Keithley S535, Administrative Manual

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Table of contents S535 Wafer Acceptance Test System Administrative Guide
Additional probe card adapter safety interlock cable ................................................................. 3-8
9139A-PCA, 9139B-PCA interlock connections for S535 systems ........................................... 3-9
LO patch panel and safety interlock ................................................................................... 3-10
Prober safety ...................................................................................................................... 3-10
Network information ........................................................................................................... 3-11
Maintenance ............................................................................................................. 4-1
Hardware replacement ......................................................................................................... 4-1
Handling and cleaning precautions ...................................................................................... 4-1
Special handling of static-sensitive devices .............................................................................. 4-2
Electrical hazard tasks ......................................................................................................... 4-3
Types of electrical hazard tasks ................................................................................................ 4-3
Repair and replacement ............................................................................................................ 4-3
Instrument removal and installation ..................................................................................... 4-4
Remove system power .............................................................................................................. 4-4
Heavy instrument removal and installation ................................................................................ 4-5
General replacement procedure ................................................................................................ 4-6
Adjustment ................................................................................................................................ 4-6
Restore system power .............................................................................................................. 4-7
Fuses ........................................................................................................................................ 4-7
Power distribution and emergency off .................................................................................. 4-8
Power distribution unit connections and power distribution basics ............................................ 4-9
System emergency off circuit .................................................................................................. 4-11
Data hub license ................................................................................................................ 4-12
Editing the icconfig_<QMO>.ini file .................................................................................... 4-13
Using NPLCs to adjust speed and accuracy ..................................................................... 4-13
Setting the number of power line cycles .................................................................................. 4-14
Setting a custom system speed .............................................................................................. 4-14
NPLC default differences ........................................................................................................ 4-15
Decommissioning an S535 test system ............................................................................. 4-15
Instrument specifications and documentation ...................................................... 5-1
Introduction .......................................................................................................................... 5-1
Switching .............................................................................................................................. 5-2
Model 707B Switch Matrix Mainframe ....................................................................................... 5-2
Sourcing and measuring ...................................................................................................... 5-3
Model 2636B System SourceMeter Instrument ......................................................................... 5-3
Model 2461-SYS System SourceMeter Instrument ................................................................... 5-3
TSP-Link controller ............................................................................................................... 5-4
Optional instrumentation ...................................................................................................... 5-4
Typical matrix connections ................................................................................................... 5-4
S535 standard 4-wire low-current on 7530-based system ........................................................ 5-5
S535 KTE communications .................................................................................................. 5-6