S535 Wafer Acceptance Test System Administrative Guide
Section 3: Equipment startup
S535-924-01 Rev. B / January 2019
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9139A-PCA, 9139B-PCA interlock connections for S535 systems
The following diagrams show the interlock connections to the optional 9139A-PCA and 9139B-PCA
Probe Card Adapters.
Figure 43: 9139A-PCA interlock block diagram for S535 systems
Figure 44: 9139B-PCA interlock block diagram
