S535 Wafer Acceptance Test System Administrative Guide
Section 4: Maintenance
S535-924-01 Rev. B / January 2019
4-7
Restore system power
Restore system power after properly performing the required maintenance or replacement of
components. Make sure that all connections are secure and connected correctly.
To restore system power:
1.
Remove the locks and tags placed on the main circuit breakers of the power distribution units
(PDUs).
2.
Connect the source power to the S535 system (power cord on the back of each of the PDUs).
3.
Place the main circuit breakers on the PDUs in the ON position.
4.
Close the rear cabinet door.
5.
Make sure the system computer and all instrument power switches are in the ON position.
6.
Close the front cabinet door.
With the system cabinet POWER switch in the OFF position, the EMERGENCY OFF (EMO) light
should be off. If the EMO light stays on, the power is not restored to all instruments in the system.
7.
Place the system cabinet POWER switch (on the front-panel door) in the ON position.
8.
Make sure the computer is turned on.
9.
Start the computer and the system software.
Fuses
Refer to the applicable instrument documentation that is included with the product for fuse
replacement.