S535 Wafer Acceptance Test System Administrative Guide
Section 3: Equipment startup
S535-924-01 Rev. B / January 2019
3-5
Shut down using KTE
To shut down using the Keithley Test Environment (KTE) software:
1.
Close all KTE programs.
2.
In the LINUX
®
terminal, type the following command:
sudo $KIBIN/shutdown_s530.pl
3.
Enter the requested password.
4.
Wait for the system computer to stop.
5.
Turn off power to the cabinet.
Emergency OFF button
An EMERGENCY OFF (EMO) button is on the system cabinet front door (see the following figure). If
you push the EMERGENCY OFF button, it removes power to all of the system instruments except the
host computer.
Figure 38: EMERGENCY OFF button
The EMO TRIPPED indicator light (on the cabinet door) turns on when the system has undergone an
emergency shutdown.
Emergency shutdown procedure
Press the red
EMERGENCY OFF
button on the front of the system cabinet. The instruments power
down and the red EMO TRIPPED indicator illuminates.
The red indicator also illuminates when the system recovers from a sudden power loss.
