In this section:
Introduction .............................................................................. 5-1
Switching .................................................................................. 5-2
Sourcing and measuring .......................................................... 5-2
TSP-Link controller ................................................................... 5-4
Optional instrumentation .......................................................... 5-4
Typical matrix connections ....................................................... 5-4
S535 KTE communications ...................................................... 5-6
Introduction
This section contains an overview of the instruments used in S535 test systems and examples of
typical connection schemes.
For more specific information about instruments used in the S535 Wafer Acceptance Test System,
refer to the documentation for each specific model:
4200A-SCS Parameter Analyzer
Series 2600B System SourceMeter
®
Instrument
2461-SYS System SourceMeter
®
Instrument
707B Semiconductor Switch Matrix
DMM7510 7-1/2 Digit Graphical Sampling Multimeter
2450 System SourceMeter
®
Instrument
4210-CVU Capacitance-Voltage Unit Card
Refer to the documentation that is bundled with the Keithley Test Environment (KTE) software
installation. You can also visit the Keithley Instruments website at
updated information by model number.
Example wiring diagrams for the S535 test system are shown later in this section.
Section 5
Instrument specifications and documentation
