JEOL JEM-2100F, Instruction Manual

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EM210F-1
SPECIFICATIONS
2.1 PERFORMANCE............................................................................................... 2-1
2.2 ELECTRON OPTICAL SYSTEM..................................................................... 2-2
2.2.1 Illuminating System ................................................................................... 2-2
2.2.2 Image Forming System............................................................................... 2-2
2.3 SPECIMEN STAGE........................................................................................... 2-2
2.4 CAMERA CHAMBER ...................................................................................... 2-3
2.5 EVACUATION SYSTEM .................................................................................. 2-3
2.5.1 For Microscope Column............................................................................. 2-3
2.5.2 For Electron Gun Chamber......................................................................... 2-3
2.5.3 Vacuum Valves ........................................................................................... 2-3
2.6 CONTROL SYSTEM......................................................................................... 2-3
2.7 INSTALLATION REQUIREMENTS ................................................................ 2-4
2.7.1 Power, Water and Nitrogen Gas ................................................................. 2-4
2.7.2 Installation Room ....................................................................................... 2-4
2.8 NITROGEN AND GAS SUPPLIES .................................................................. 2-4
2.9 DIMENSIONS AND WEIGHT (MM AND KG) .............................................. 2-5
2.10 WARRANTY...................................................................................................... 2-5