5 OPERATION
5-12
EM210F-1
5.2.4c Accelerating
voltage
generation
1.
Confirm every three months that the reading of the pressure meter for the HT
tank is 1.0 or more. If less, replenish the tank with gas (
F
the maintenance
manual).
2.
Confirm that the column pressure is lower than 4
´
10
—5
Pa (displayed on the
150 L ion pump power supply).
3.
Make sure that the dispensing and receiving magazines are in the camera
chamber, and the specimen holder is in the goniometer.
?
When the specimen holder is not in the goniometer, electron gun chamber
isolation valve (V1) can not be opened.
4.
Make sure that the “Cond Knob Position” is “OPERATE”
5.
Make sure that “HT status” on the screen is “Ready”.
6.
Set the HT value to 100 kV using the UP/DOWN triangles on the screen.
7.
Depress the HT-ON button on the screen.
5.2.4d Electron beam generation in the automatic mode
The “High Voltage Control screen is used for the automatic mode.
1.
Make sure that an accelerating voltage of 100 kV is being generated (The HT
value on the screen is 100 kV).
2.
Make sure that the “Emission Status” on the screen is “Ready”.
3.
Set “Auto HT and Emission” to ON.
?
Electron beam is generated automatically. The generation completes in 60
minutes or 90 minutes.
4.
Make sure that the “Emission Current” on the screen is the specified value or
less.
?
If the “Emission Current” is not the specified value, open the FEG and QES
setting screen and consult the JEOL service center.
