5 OPERATION
EM210F-1
5-13
5.2.4e
Beam generation stopping in the automatic mode
1.
Open the “High Voltage Control” screen.
2.
Set “Emission” on the screen to OFF.
3.
Set Auto HT-step to 1 kV on the screen.
4.
Set HT value to 100 kV with “Up/Down” on the screen.
5.
Depress HT-OFF on the screen.
5.2.4f
Beam generation in the automatic mode.
Electron beam generation in the manual mode will be impossible while the automatic
beam generation and/or stopping are/is performed. Beam generation in the manual mode
will be possible if the beam is stopped manually and the special mode for maintenance is
used. This operation should be performed under the directions from a JEOL service
office.
1.
Make sure the followings.
·
An accelerating voltage of 100 kV is being generated.
·
“Emission Currents…” on the screen is “Ready”.
·
“Cond Knob Position” on the screen is OPERATE.
2.
Depress “Emission Current” on the screen.
?
“Emission Currents” is switched to ON and commences flickering.
3.
Set the emitter temperature to 1800 K as follows.
a.
Set the value on “Monitor” of “Filament…” to 1.0 A using the triangles.
?
The value of “Target” changes with the triangle buttons. The value on the
“Monitor” increases toward the “Target” value.
b.
Use the triangle buttons to set “Monitor of “Filament…” so that the “Monitor”
value increases 0.1 A per one minute, increase the value to the specified
value (given when the instrument is installed), and leave it until for 20
minutes.
A current of about 10
m
A should now be generated when no bias is applied.
?
The emitter will be damaged if the emitter temperature exceeds 1800 K. The
emitter may also be damaged if the emitter is left for over 2 hours without
beam generation.
4.
Use the triangle buttons to set the value on “Monitor” of “Bias…”to the
specified value.
5.
Use the triangle buttons to set the value on “Monitor” of “A2…”to the specified
value. Use the triangle buttons of the to set the value on “Monitor” of
“A2…”to the specified value.
6.
Set the 1
st
anode voltage A1 as follows.
a.
Use the triangle buttons of “Monitor” to set the value on “Emission Cur-
rents…” to 1.0 and leave it for 5 minute.
b.
Use the triangle buttons of “Monitor” to set the value on “Emission Cur-
rents…” to 5.0 and leave it for 5 minute.
c.
Use the triangle buttons of “Monitor” to set the value on “Emission Cur-
rents…” to 10.0 and leave it for 5 minute.
d.
Increase the “Emission Currents” value to the specified value in the same
way at intervals of 5 minutes.
