4 DESCRIPTION OF CONTROLS
4-44
EM210F-1
4.4.6q Stage
Limit
screen
①
③
②
Fig. 4.50 Stage Limit screen
①
S/W limited
Alarms that the specimen movement (X, Y, Z, Tilt-X and/or Rotator) reached the
limit (the corresponding lamp lights up). The movement is detected using a poten-
tiometer in this case.
②
H/W limited
Alarms that the specimen movement (X, Y, Z, Tilt-X and/or Rotation) reached the
limit (the corresponding lamp lights up). The movement is detected using an optical
censor in this case.
③
Mechanical-Limit
Alarms that the specimen holder is grounded.
