2 SPECIFICATIONS
2-2
EM210F-1
2.2 ELECTRON OPTICAL SYSTEM
2.2.1 Illuminating
System
·
Electron gun
Emitter: ZrO/W
(100)
Electron gun lens:
Electrostatic lens.
Axis alignment:
Electromagnetic 2-stage interlocking system.
Airlock:
Automatic.
·
Condenser lens
Type:
Three-stage (1st, 2nd and mini).
Aperture:
10, 40, 100, 250
m
m in diameter (click stop type).
Stigmator:
Electromagnetic type complete with centering device.
Alignment:
Electromagnetic 2-stage interlocking system, 4 circuits
for exclusive use in 4 modes (TEM, EDS, NBD and
CBD).
·
Beam tilting angle:
Max. 5
°
in all directions.
2.2.2 Image Forming System
·
Image forming lenses:
Rotation-free, electromagnetic 6-stage system (objective
lens, OM lens, 1st, 2nd and 3rd intermediate lenses,
projector lens).
·
Objective apertures (click stop mechanism)
When the EM-20193 or 20458 polepiece is used:
5, 30, 40and 60
m
m in diameter
When the EM-20014, 20023 or 20043 polepiece is used:
5, 20, 60and 120
m
m in diameter
·
Field limiting apertures (click stop mechanism):
10, 20, 50 and 120
m
m in diameter
·
Stigmator:
Electromagnetic type; complete with centering device;
and five control circuits.
2.3 SPECIMEN
STAGE
·
Specimen exchange:
Automatic (airlock mechanism).
2-stage evacuation.
·
Loading capacity:
One specimen.
·
Specimen movement range
X and Y directions:
±
1 mm, position of field of view under observation
displayed on the monitor.
Z direction:
When the EM-20014 polepiece is used:
±
0.1 mm
When the EM-20023, EM-20043, or EM-20193 polepiece is used:
±
0.2 mm
·
Specimen tilt angle (when a double tilt specimen holder is used):
When the EM-20014 polepiece is used:
±
25
°
/
±
25
°
When the EM-20023 polepiece is used:
±
35
°
/
±
30
°
When the EM-20043 polepiece is used:
±
42
°
/
±
30
°
When the EM-20193 polepiece is used:
±
38
°
/
±
30
°
