CONTENTS
EM210F-1
C-3
5.5.3
High Dispersion Electron Diffraction ...........................................5-45
5.6
USE OF THE ANTICONTAMINATION DEVICE ............................5-47
5.6.1
Filling the Refrigerant Tank...........................................................5-47
5.6.2
Raising the Trap Temperature to Room Temperature ....................5-48
5.7
SPECIAL OPERATION.......................................................................5-51
5.7.1
Alignment Data Saving .................................................................5-51
5.7.2
Free Lens Control (FLC)...............................................................5-52
5.8
APPENDIX ..........................................................................................5-53
5.8.1
Microscope Console and Column .................................................5-53
5.8.2
Objective Aperture ........................................................................5-54
5.8.3
Vacuum Pumps..............................................................................5-54
