6.
HV control or ion pump operation
6.1.
Prior to using an ion pump
Confirm following:
▪
Rough pump down to 1 x 10
-4
torr or less (the lower the better).
1 x 10
-6
torr is recommended. See Rough Pump user manual for details.
NOTE:
Use the full extent of available rough pumping before starting an ion pump to
extend pump’s lifetime, improve system ultimate pressure, and get accurate
current readings.
▪
Evacuate the Vacuum System.
▪
Ensure contaminants do not exist in the system.
▪
If necessary (i.e. ion pump exposed to atmospheric pressure) bake the ion
pump and system into roughing pump to achieve lowest pressure. See
ion Pump user manual for details.
6.2.
Prior to turning on HV and starting an ion pump
Confirm following:
▪
Verify high voltage cable is installed and connecting controller High
Voltage (HV) output connector (rear panel, J501
‑
J504) to the ion pump.
▪
Verify controller and connected ion pumps are grounded using
redundant ground wire.
▪
Verify controller’s high voltage output has correct polarity for the
connected ion pump (positive for diode pump, negative for triode pump).
▪
Verify safeconn interlock is satisfied. If high voltage cable has optional
safeconn interlock feature, an additional connector is part of the high
voltage cable. Connect it to controller’s safeconn connector (J401 - J404). If
high voltage cable does not have safeconn interlock feature, use safeconn
shorting jumper cable to connect to controller’s safeconn connector
(J401
‑
J404).
▪
Safeconn interlock must be satisfied, otherwise HV cannot be turned on.
▪
If safeconn interlock is not satisfied, controller will display error 20
(safeconn interlock not satisfied) for that HV channel.
▪
Verify proper pump size is configured. HV cannot be turned on if pump
size is set to 0. By default pump size is set to 0. If pump size is set to zero,
controller will display error 22 (pump size not configured) for that HV
channel.
6.3.
Turn HV on and off
Turning HV on and off can be achieved:
▪
Using front panel touchscreen.
▪
Using remote communication (serial, ethernet or profibus).
▪
Using rear panel connector J104, Misc. I/O. (Digital Inputs).
Page 15
900034_C
900034_C - HV control or ion pump operation
