Entegris
®
, the Entegris Rings Design
®
, and other product names are trademarks of Entegris, Inc. as listed
on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or
registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship,
or endorsement by the trademark owner.
©2013-2022 Entegris, Inc. | All rights reserved. | Printed in the USA | 1220-7373ENT-0722
129 Concord Road
Billerica, MA 01821
USA
Tel
+1
952 556 4181
Fax
+1
952 556 8022
Toll Free
800 394 4083
Corporate Headquarters
Customer Service
LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit
link in the footer. Entegris does not warrant any
failure in the case of customers using unapproved foreign components.
FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit
link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit
and select the
link in the footer.
www.entegris.com
User Manual
Check item and visual aid
Result
3. Make sure the waferlock frame touches the
dome wall. No gap is allowed.
Waferlock Pin:
o
Touching
o
Gap
Remarks:
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN IV DOME (CONTINUED)
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