10
A200 SMIF POD
User Manual | Entegris, Inc.
VISUAL INSPECTION
Inspect the pod to do a quick visual check for
damaged parts and surfaces that could affect
pod performance. This inspection can easily
be performed in conjunction with pod cleaning.
General Guidelines
Frequency (est.)
Approximately once per year
Time to perform (est.)
2 minutes
Required parts
None
Required tools and
equipment
None
Procedures
Shell Assembly
• Inspect tightness of AK flange installation if one is
installed on the pod. Inspect the flange for damage
or excessive wear.
• Inspect tightness of side handle installation. Inspect
the handles for damage or excessive wear.
Door Assembly
• Inspect door cassette guides for damage or wear.
Make sure they are installed tightly to the door by
looking for a gap around the bottom.
• Inspect door flatness. Place door on a granite
table and using a 0.020" feeler gauge inspect
the edges of the door. Doors that allow the
feeler gauge under them should be removed
from service.
