entegris A200 SMIF POD, User Manual

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A200 SMIF POD
User Manual | Entegris, Inc.
OVERVIEW
—
Preventive maintenance of the 200 mm A200
SMIF Pod includes five key actions that are per-
formed periodically to prevent larger problems
with product performance:
1. Cleaning and drying
2. Periodic replacement parts
3. Functional inspection
4. Visual inspection
5. Dimensional inspection
A brief overview is provided in the tables below.
Frequencies and times are approximate. Frequency
is recommended based on level of risk (is the failure
catastrophic for the contents?), potential frequency
of failure, and ease of inspection. Detailed information
and procedures are provided following the tables.
90-DAY INSPECTION GUIDELINES
Recommended inspections for every cleaning cycle,
every 90 days or after an incident.
ACTION TIME CRITERIA DESCRIPTION CORRECTIVE ACTION
Cleaning and
drying Per customer
cycle Cleanliness Verify shell and door
cleanliness Clean pod using approved
method
Visual inspection 15 seconds Cracking or
splitting Inspect for partial splits or breaks, or
a separation of material Discontinue use and
consult Entegris
Scratches
(internal
shell surface) Inspect for thin or shallow cuts,
which could potentially release
particles from the shell surface Discontinue use due to
potential contamination
risk and review pod
handling procedures
Chipping or
broken edges Inspect for areas where a section
of material is missing, potentially
causing a functional issue Discontinue use and review
pod handling procedures
Alignment
tabs/pins Inspect for pins that are bent
or broken off. Damaged pins
could allow a door to be inserted
backwards. Discontinue use and review
pod handling procedures
Chemical
attack (crazing,
pitting) Inspect for crazing or pitting
due to chemical attack Discontinue use and
consult with Entegris
Gasket wear Inspect gasket for cuts and nicks.
Also verify that the gasket is seated
completely in its channel. If cuts or nicks are
discovered, replace gasket
Cassette Hold
Down (CHD) Inspect the cassette spring for
proper placement and signs of
degradation Re-install CHD if
undamaged or replace
Waferlock Verify all parts are present and
installed properly Remove from service and
determine root cause
Waferlock Verify knife edge of waferlock is free
of nicks, cuts, and damage Remove from service and
replace
Waferlock Verify the waferlock frame is not
warped, deformed, or damaged Remove from service and
determine root cause
Functional
inspection 15 seconds Waferlock Verify the waferlock functions
properly Remove from service and
determine root cause