12
A200 SMIF POD
User Manual | Entegris, Inc.
Check item and visual aid
Result
4. Make sure the waferlock frame is not
dislodged from dome
Waferlock Frame:
o
Not
o
Dislodged
dislodged
Remarks:
5. Make sure the waferlock O-ring is present
Waferlock O-ring:
o
Present
o
Missing
Remarks:
6. Make sure the waferlock screw is fully torqued
Screw Torque:
o
No gap
o
Gap
Remarks:
Screw torqued at 6 in•lbf
7. Make sure the waferlock pod dowel pin
touches the dome wall
Waferlock dowel pin:
o
Touching
o
Gap
Remarks:
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN V DOME (CONTINUED)
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