8
A200 SMIF POD
User Manual | Entegris, Inc.
ANNUAL PROCEDURES
—
PERIODIC REPLACEMENT PARTS
Some wear parts need periodic replacement. Ideally
parts should be replaced before they start causing
performance problems, not after wear and perfor-
mance degradation has been observed.
General Guidelines
Procedure
Gasket installation
Cassette hold down installation
Waferlock and wheel installation
Frequency (est.)
Approximately once
every year
Approximately once every year
Approximately once every year
Time to perform (est.)
2 minutes
1 minute
2 minutes
Required parts
Gasket kit:
P/N 9700-4246-XX
Waferlock and wheel kit:
P/N 9700-9667-01
CHD kit: P/N 9701-0167-XX
Required tools
and equipment
Gasket installation tool:
P/N M200-0070
None
CHD installation tool
Rubber or dead strike mallet
Procedures
Gasket Installation Procedure
1. Place the seal on the pod door matching the two
notches on each of two sides of the seal with the
mating slots on the two sides of the pod door.
This ensures correct orientation of the seal on
the pod door.
2. Ensuring that the notches in the seal are properly
aligned with the mating features in the pod door,
press the seal into the groove around the perimeter
of the pod door. It is generally recommended to
start with the four corners, then do the middle of
each side, and then press the rest of the gasket into
the groove.
3. Lightly push on the gasket roller tool while run-
ning the roller over the seal along the inside edge
of the seal. First roll the straight sides, then the four
corners.
Ensure that the outer edge of the seal does
not hang over the flange of the door. The seal
should be inside the flange.
4. Inspect the seal for uniform installation and proper
fit into the pod door groove. The top surface of the
seal must be even and smooth.
