A200 SMIF POD
7
User Manual | Entegris, Inc.
FUNCTIONAL INSPECTION
Inspect the performance of the waferlock to confirm
proper operation.
General Guidelines
Frequency (est.)
Every 90 days
Before each new lot of wafers
After a waferlock performance
event
Time to perform (est.)
30 seconds
Required parts
None
Required tools
and equipment
None
Procedures
Cycle the waferlock slowly three times by hand. Feel
for catching and hitching as you push the waferlock
up to the closed position. Slowly lower the waferlock
and make sure it does not hang up or bind in the
closed position.
SIX-MONTH PROCEDURES
—
VISUAL INSPECTION
Inspect the pod to do a quick visual check for
damaged parts and surfaces that could affect
pod performance. This inspection can easily be
performed in conjunction with pod cleaning.
General Guidelines
Frequency (est.)
Approximately every 6 months
Time to perform (est.)
30 seconds
Required parts
None
Required tools
and equipment
Philips head screwdriver
Procedures
Door Assembly
• Visually inspect door bottom for loose, protruding,
or missing screws. Run a hand over the bottom of
the door to feel for protruding screws. If less than
two screws are found to be loose or missing, they
can be tightened or replaced with a screwdriver.
If more than two screws have a problem, the door
should be removed from service.
FUNCTIONAL INSPECTION
Check the performance of the pod door to make
sure that it is unlikely to fail and cause a door drop
incident. Door torque is a good indication of wear
of door mechanisms.
General Guidelines
Frequency (est.)
Approximately every 6 months
Time to perform (est.)
2 minutes
Required parts
None
Required tools
and equipment
Snap-on Tools Torqometer
®
or equivalent (model number
TEC1FUA)
Modified manual pod opener
(base part number M200-0050)
Procedures
Door Assembly
• If measured door opening torque is below
2.5 in•lb or closing torque is above 15 in•lb,
it is likely there is something wrong with the
door and it should be removed from service.
• With the door in the shell, slowly and steadily
close or open the door using the manual opener
and torqometer. Swift movement of the torque
meter may give erroneous readings.
