entegris A200 SMIF POD, User Manual

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A200 SMIF POD
3 User Manual | Entegris, Inc.
SIX-MONTH INSPECTION GUIDELINES
Recommended inspections for every sixth cleaning
cycle, every six months or after an incident.
ACTION TIME CRITERIA DESCRIPTION CUSTOMER ACTION
Visual inspection 15 seconds Door screws Inspect for visibly loose
(coming out) or missing screws Tighten or replace screws
Functional
inspection 45 seconds Door closing
torque Amount of force required to
fully lock the door mechanism.
Closed <15 in•lb Determine root cause,
remove door from service
Door opening
torque Amount of force required to
fully lock the door mechanism.
Open ≥2.5 in•lb Determine root cause,
remove door from service
ANNUAL INSPECTION GUIDELINES
Recommended inspections for every 12th cleaning
cycle, every year or after an incident.
ACTION TIME CRITERIA DESCRIPTION CUSTOMER ACTION
Periodic
replacement
parts 2 minutes Gasket Replace gasket Gasket Kit (20 gaskets per
kit): P/N 9700-4246-XX
(last two numbers TBD at
order time)
1 minute Waferlock and
wheel Replace waferlock and wheel Waferlock and Wheel
Only Kit (50 per kit):
P/N 9700-9667-01
2 minutes Cassette Hold
Down (CHD) Replace CHD Kit number depends on
CHD style. Contact
Entegris for part number.
Visual inspection 15 seconds Automation
button (top
robotic flange,
AK handle) Inspect for general damage and
verify tightness Replace damaged part,
tighten loose screws
15 seconds Ergo handles,
side rails Inspect for general damage and
verify tightness Replace damaged part,
tighten loose screws
15 seconds Door cassette
guides Inspect for general damage,
inspect for gap between door
cover surface and bottom of guide Replace damaged part,
tighten loose screws
1 minute Door flatness Verify door is flat Replace door