A200 SMIF POD
13
User Manual | Entegris, Inc.
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN IV DOME
—
Check item and visual aid
Result
1. Hand pull the waferlock frame to
make sure it is fully seated and tight,
and check the screw to make sure
it is straight
Lift the pivot and make sure the
retainer moves freely. Perform three
cycles. Rotate the wheel and make
sure it can spin freely.
Waferlock Frame:
o
Tight
o
Loose
o
Straight
o
Tilted
Screw:
o
Tight
o
Loose
Retainer:
o
Moves freely
o
Stuck
Wheel:
o
Spins freely
o
Jammed
Remarks:
Screw torqued at 3 in•lbf
2. Make sure the waferlock lock is not tilted
(<0.06") by using the feeler gauge. The
gauge must not go through.
Feeler Gauge:
o
Pass
o
Fail
Remarks:
