Edwards STP-iXA3306B, Manual

Page: 27 / 181

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 15
T
EC
H
N
IC
A
L
D
A
T
A
2
2.2.2 STP-iXA3306B/BV
Cooling water backing-pump Gas
Maximum gas flow-rate
[Pa
･
m
3
/s]
[SCCM]
15 to 25 ºC > 1,300 L/min Ar 3.72 2200
N
2
4.05 2400
> 10,000 L/min Ar 5.24 3100
N
2
6.76 4000
26 to 35 ºC > 1,300 L/min Ar 3.72 2200
N
2
4.05 2400
> 10,000 L/min Ar 4.90 2900
N
2
6.59 3900
Table 3 - Maximum gas flow-rate (STP-iXA3306B)
Cooling water backing-pump Gas
Maximum gas flow-rate
TMS
(setting value) [Pa
･
m
3
/s] [SCCM]
15 to 25ºC > 1,300 L/min Ar 3.55 2100 70 ºC
N
2
3.89 2300
> 10,000 L/min Ar 4.23 2500
N
2
6.42 3800
Table 4 - Maximum gas flow-rate (STP-iXA3306BV)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the purge gas
flow rate <N
2
> 8.4×10
-2
±1.7×10
-2
Pa•m
3
/s (50±10 SCCM) is used. It is changed depending on condition. For example, when
the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact
Edwards.