STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 157
SA
F
ET
Y
F
U
N
C
T
IO
N
S
Ref
er
red
S
ec
tion
T
ab
le
55
-
E
rr
or L
is
t
(c
on
ti
n
ue
d)
Co
u
n
ter
mea
sure
s
1.
Cont
ac
t
S
erv
ic
e
off
ic
e.
2.
Cont
ac
t
S
erv
ic
e
off
ic
e.
1.
Cont
ac
t
S
erv
ic
e
off
ic
e.
2.
Conn
ec
t th
e
c
ab
le
s
ec
urel
y
.
3.
Cont
ac
t
S
erv
ic
e
off
ic
e.
4.
W
he
n t
h
e TM
S
fu
nc
ti
o
n
i
s
no
t
in u
s
e
, s
et
the
"
T
M
S
O
pti
o
n
"
to
"DIS
A
B
L
E
"
w
it
h
di
s
pl
ay
un
it
iDT
-00
1
or
S
T
P
-L
ink
.
P
ro
b
abl
e c
au
se
s
1.
F
ai
lure of
th
e
TMS
he
ate
r.
2.
F
ai
lure of
th
e
TMS
un
it.
1.
Di
s
c
on
ne
c
ti
on
of
t
he
T
MS
s
en
s
or.
2.
D
is
c
on
ne
c
ti
on
of
t
he
ex
ternal
T
M
S
c
on
n
ec
ti
o
n
c
ab
le.
3.
F
ai
lure
of
th
e
ex
terna
l
T
M
S
c
on
ne
c
ti
o
n c
a
bl
e
.
4.
Inc
orr
ec
t s
ett
ing
o
f th
e
T
MS
f
un
c
ti
on
.
O
cc
u
rr
ence
con
d
it
ion
T
MS
t
em
p
erature
c
on
tr
ol
err
or
(when
t
he
TM
S
un
it
de
tec
ti
o
n
tem
p
erature
be
c
om
es
l
ow
er
tha
n
the
s
e
tti
ng
v
al
ue
by
10
°C
(-
18
º
F
) or m
ore.
E
rr
or i
s
no
t
de
tec
te
d f
or
a
c
ertai
n t
im
e a
fter
the
S
T
P
pu
m
p
s
tarts
.
T
MS
s
en
s
or
is
no
t
c
on
ne
c
te
d wh
en
the
s
tat
e "
T
MS
O
pti
o
n
"
is
"E
N
A
B
LE
".
P
u
mp
op
er
atio
n
D
ec
el
er
at
e
an
d
s
top
D
ec
el
er
at
e
an
d
s
top
(E
rr
o
r
me
ss
age
)
T
MS
L
ower
T
em
p
T
MS
S
en
s
or
Lo
s
t
"
F
AIL
UR
E
"
L
E
D
S
tea
dy
r
ed
