STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page vi
PAGE
vi
ILLUSTRATIONS
Figure
Title
Page
1
STP pump installation warning label
6
2
Hot surface warning label
6
3
Heavy product caution label
7
4
High voltage device caution label
7
5
Rotation instruction label
7
6
Cross sectional view of the STP pump
8
7
External appearance of STP-iXA3306C(V)/iXA3306B(V)
19
8
Label affixing positions
20
9
Space around the STP pump
23
10
Example of lifting the STP pump
25
11
Example of lifting the STP pump (horizontal positioning)
26
12
Jack-up the STP pump
27
13
Control unit bottom face
27
14
Prohibited matter
28
15
STP pump with eyebolts
28
16
Configuration of the STP pump
29
17
Control unit (Front panel)
30
18
Installation of the STP pump to the vacuum equipment
33
19
STP pump installation positions
35
20
Positions of the outlet port on the horizontally
or slanted installed STP pump
35
21
Shape of reduced diameter shank bolts
39
22
Methods of securing the STP pump
39
23
Screw holes for securing the base
40
24
Power cable
41
25
Connecting method of the power cable
42
26
Connecting the purge port
46
27
Positions of the cooling water port
47
28
Baking heater installation position
48
29
Configuration of the TMS
50
30
TMS valve connection
52
31
Pump operation method 1 (contact input)
60
32
Pump operation method 2 (contact input)
60
33
Pump operation method 1 (voltage input)
61
34
Pump operation method 2 (voltage input)
61
35
"ROTATION" LED Indication
63
36
X2 REMOTE connector
64
37
X2 REMOTE input signal pins (contact input)
67
38
X2 REMOTE input signal pins (voltage input)
70
39
X2 REMOTE output signal pins
76
40
Serial port
79
41
X3/X4 connector (D-Sub9)
81
42
RS485 connections
82
43
Grounding example (Both ends grounding)
86
44
Grounding example (single point grounding)
86
45
Example of ring ferrite core installation
87
46
Example of cable installation in metallic duct
87
47
Example of differential signal waveform
88
48
PC to SIM communication
89
49
Block diagram of communication process example
99
