STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 16
T
EC
H
N
IC
A
L
D
A
T
A
PAG
16
2.3
Water cooling use condition
Use cooling water which fulfills the following conditions.
Item
Specification
Port type
Rc 1/4 (Female)
Flow rate
L/min
3
Water temperature
°C
15 to 35
*1
Water pressure
MPa (kgf/cm
2
)
0.3 (3)
Maximum grain size
mm
2
0.03
pH
6.5 to 8.0
Water hardness
mg/L
100
Resistivity
k
Ω
･
cm
4 to 1000
Turbidity
FNU
< 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature.
