STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 8
IN
T
R
O
D
U
C
T
IO
N
1.7
Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iXA3306 series pump is a series of a magnetically-levitated turbomolecular pumps, each
with the following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
5. Temperature management system
6. Dust and water protection (STP-iXA3306C/B)
1. Rotor blade
4. Radial electromagnet
7. Touch down bearing
2. Stator blade
5. Axial sensor
8. Control unit
3. Radial sensor
6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
1
2
4
6
7
3
3
5
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