STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
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ILLUSTRATIONS (CONTINUED)
Figure
Title
Page
50
Example of answer resending process
100
51
Example of response when the command is sent continuously 100
52
Example of command sending during answer data reply
100
53
Example of communication cycle process
101
54
Example of command sending process
102
55
Example of answer receiving process
102
56
Display unit iDT-001
140
57
WARNING output
146
58
Failure output
151
