STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 39
IN
ST
A
L
L
A
T
ION
1.
Vacuum equipment
ISO250F
ISO320F
VG250
VG300/VG350
2.
Inlet port flange
A
15 mm
20 mm
15 mm
18 mm
3.
Washer
B
2 mm
2.5 mm
2.5 mm
2.5 mm
4.
Torque reduction mechanism
C
35 mm
50 mm
50 mm
50 mm
5.
Bolt insert position
D
22 mm
24 mm
24 mm
24 mm
Figure 21 - Bolt position for securing the flange
(i) When the base is
not secured
(ii) When the base is secured
1.
Recommended fitting bolt for flange
2.
Secure the base (legs)
Figure 22 - Methods of securing the STP pump
1
2
1
2
5
4
3
