STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section
Title
Page
5.4.21
ReadOptions
136
5.4.21.1
Second speed function setting
136
5.4.21.2
Second speed select
137
6
STP-LINK AND DISPLAY UNIT
139
6.1
STP-Link
139
6.2
Display unit
140
7
SAFETY FUNCTIONS
141
7.1
Safety functions
141
7.1.1
Power Failure
141
7.1.2
Operation after a power recovery
142
7.1.3
Abnormal state of magnetic bearing (Disturbance)
143
7.1.4
Excessive vibration (Disturbance)
143
7.1.5
Motor driver overload (DRV Overload)
143
7.1.6
Overheating inside the STP pump (MOTOR Overheat)
143
7.1.7
Overheating inside the control unit (CNT Overheat)
143
7.1.8
Overspeed
144
7.1.9
Abnormality/Error in the TMS unit (for use with the TMS unit) 144
7.2
"WARNING" function
145
7.2.1
"WARNING" function
145
7.3
Contents of WARNING function
147
7.3.1
First Damage limit
147
7.3.2
Second Damage Limit
147
7.3.3
Pump run time over
147
7.3.4
Pump Overload
148
7.3.5
Imbalance
148
7.4
WARNING function setting
149
7.5
Troubleshooting immediately after failure occurs
150
7.5.1
After power failure
150
7.5.2
After other abnormality/error
150
7.6
Troubleshooting
151
7.6.1
Indication of "FAILURE" LED (red)
151
7.6.2
Indication of "FAILURE" LED (green)
158
7.6.3
No Indication of the "FAILURE" LED
158
8
MAINTENANCE AND INSPECTION
159
8.1
Maintenance and inspection
159
8.2
Cleaning
160
8.3
Inspecting the deposit
160
8.4
Maintenance
161
8.4.1
Recommended overhaul intervals
161
8.4.2
Standard replacement parts
161
8.4.3
Recommended maintenance intervals for main parts
162
8.5
Transporting for repair or overhaul
163
