STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 13
T
EC
H
N
IC
A
L
D
A
T
A
2
TECHNICAL DATA
2.1
STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
STP-iXA3306C(V) / STP-iXA3306B(V)
Flange size
Inlet port flange
VG250 / ISO250F
ICF305 (DN250CF)
VG300 / VG350
ISO320F
ICF356 (DN320CF)
Outlet port flange
KF40
Pumping speed
N
2
L/s
2650
3200
Ar
L/s
2300
2800
H
2
L/s
2050
2300
Compression ratio
N
2,
Ar
>10
8
H
2
>2.0×10
3
Ultimate pressure
Pa (Torr)
10
-7
(10
-9
) [after baking]
Allowable backing pressure
Pa (Torr)
266 (2): Water cooling/TMS unit used
Flow rate of purge gas <N
2
>
Pa·m
3
/s(SCCM)
8.4×10
-2
±1.7×10
-2
(50±10)
Rated speed
rpm
27,700
Backup rotational speed
*1
rpm
Approximately 5,000
Starting time
min
≦
10
Stopping time
min
≦
16
Noise
dB
< 55 (at 27,700 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Recommended backing-pump
L/min
>1,300
Mass
*2
kg
80
83
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2
Mass is a value of state that the only standard accessory was installed (except the optional accessory).
