Edwards nEXT 55, Instruction Manual

Page: 40 / 116

Quantity Description
Check (
ü
)
1 Integral mesh centring ring O-ring seal (ISO variants only.
Screen will be installed to CF pumps.)
❏
Figure 18 Typical pumping system with a nEXT pump
1. Vacuum system 2. High vacuum gauge
3. Vibration damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap
*
10. Backing pump
*§
11. Mist filter
*
/ silencer
§ 12. Vent valve
13. Alternative position for vent valve
14. Radial air cooler 15. PRX purge restrictor
16. Regulated purge gas supply 17. WCX water cooler and connections
18. Axial air cooler 19.
1. Vacuum system 2. High vacuum gauge
3. Vibration damper 4. Inlet screen
5. nEXT pump 6. Backing valve
7. Vacuum gauge 8. Flexible bellows
9. Foreline trap
*
10. Backing pump
*§
11. Mist filter
*
/ silencer
§ 12. Vent valve
13. Alternative position for vent valve
14. Radial air cooler 15. PRX purge restrictor
16. Regulated purge gas supply 17. WCX water cooler and connections
18. Axial air cooler 19.
*
for rotary pump
§
for scroll pump
Note:
An interstage port is available on the ‘i’ variant but is not shown in the figure.
07/2021 - ©Edwards Limited Page 40 B8G000880_E
B8G000880_E - Installation