Edwards nEXT 55, Instruction Manual

Page: 36 / 116

Parameter
Value
Operation attitude Vertical and upright to horizontal ± 2°
Normal rotational speed 90,000 revolutions per minute
Starting Time to 90% Speed (80 W) 130 seconds
Starting Time to 90% Speed (120 W) 90 seconds
Sound pressure level, at ultimate vacuum
measured at 1 m from the pump to
ISO3744
34 dB(A) + 2.5 declared dual number noise
emission values in accordance with
ISO4871
3.13 Pump performance data nEXT55
Table 17
Pump performance data
Parameter
nEXT55D nEXT55D
Mass 2.5 Kg 3.5 Kg
Main inlet port ISO63 CF63
Exhaust port NW16
Vent port 1/8 inch BSP
Main inlet pumping speed:
N
2
(l s
-1
)
55
He (l s
-1
)
41
H
2
(l s
-1
)
27
Ar (l s
-1
)
55
Peak compression ratio from the backing port to the main inlet port:
N
2
> 10
11
He
6.9 x 10
5
H
2
2.9 x 10
4
Ar
> 10
11
Ultimate pressure (mbar)
< 1 x 10
-7
< 1 x 10
-8
Note:
Pumping speeds quoted are without inlet screens. Inlet screens may reduce the pumping
speed by up to 20%. Pumping speeds are measured in accordance with ISO 5302:2003.
07/2021 - ©Edwards Limited Page 36 B8G000880_E
B8G000880_E - Technical data