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Table 4
Purge gas specification
Purge gas specification
Reference data
Purge gas
Dry air, nitrogen, argon or other inert
gases
Maximum dew point at an atmospheric
pressure
-22 °C
Maximum size of particulates
1 µm
Maximum concentration of oil
0.1 parts per million
Permitted purge gas flow (when necessary) 20 to 50 sccm (0.33 to 0.84 mbar l s
-1
or
33 to 84 Pa l s
-1
)
Recommended purge gas flow
25 sccm (0.42 mbar l s
-1
, 42 Pa l s
-1
)
Maximum permitted supply pressure of the
purge gas
1 bar (gauge), 14.5 psig, 2 x 10
5
Pa
3.5 Cooling water
Table 5
Water cooling block supply requirements
Parameter
Reference data
Quality
Mechanically and optically clear with no
deposits or turbidity
pH value
6.0 to 8.0
Maximum calcium carbonate concentra-
tion
75 parts per million
Maximum chloride concentration
100 parts per million
Minimum oxygen concentration
4 parts per million
Minimum cooling water flow rate (at
15 °C)
15 l hr
-1
Water temperature range
10 °C to 40 °C
Maximum water pressure
5 bar (gauge), 72.5 psig, 5 x 10
5
Pa gauge
Materials exposed to the cooling water
Nickel plated brass
07/2021 - ©Edwards Limited
Page 23
B8G000880_E
B8G000880_E - Technical data
Summary of Contents for nEXT 55
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