Product description
Use
The COBRA BC vacuum pumps are designed for use in the field of
microelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum pump is intended for use in a potentially non-explosive
environment.
As far as temperature is concerned, the vacuum pump is suitable for
evacuation of a 300 liters tank. The vacuum pump is not suitable for
continuous duty at a pressure more or equal than 150 (hPa) mbar.
Caution, the operating cycle of 150 (hPa) mbar must not exceed more
than 5 min.
For other applications, contact your Busch representative.
- Maximum inlet pressure: 1 bar (abs).
- With pump running at full speed, do not expose to inlet pressure
> 300 (hPa) mbar.
The vacuum pump is tight down to ultimate pressure.
Operating principle
The COBRA BC 0200 F vacuum pumps are COBRA NW screw vacuum
pumps with cooling water and nitrogen circuits.
The COBRA NW screw vacuum pumps operate according to the prin-
ciple of screw pumps. Two parallel screws (5) rotate in opposite direc-
tions in the pump body. Entering gases are trapped between the flights
Product description
BC 0200 F
Page 5
0870767417 (En)
DP
PSA
OSG
Cooling water inlet
Nitrogen inlet
Cooling water outlet
CWR
NRV
TS
MOT
TSA
CWM
DGF
DGR 2
DGR 1
VFD
Process gas inlet
Process gas outlet
1
2
3
5
6
4
4
1
Inlet
2
Discharge
3
Oil
4
Cooling water
5
Screw rotors
6
Temperature switch (motor)
CWR Cooling water regulating valve
DGR 1 Regulating valve, dilution gas
DGR 2 Regulating valve, dilution gas
DGF Nitrogen flow meter, dilution gas
NRV Nitrogen regulating valve
OSG Oil level indicator
CWM Cooling water flow meter
PSA Pressure transmitter
TSA Temperature sensor PT100
MOT Motor
TS Temperature switch (motor)
VFD Variable frequency drive
Summary of Contents for COBRA BC 0200 F
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