BUSCH COBRA BC 0200 F, Installation And Maintenance Instructions Manual

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Noise emission
Refer to the table “Technical data” for the permissible noise level in
free field conditions according to EN ISO 2151.
CAUTION
The intensity of the noise of the vacuum pump is higher within a
certain area of the pump.
Risk of hearing damage.
Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum pump.
Maintenance clearance
Before any maintenance action, ensure a maintenance clearance
around the pump of min. 610 [mm].
Electrical safety
Types of Electrical Work
The following are the four types of electrical work defined by the SEMI
S2, latest version, guideline:
Type 1
Equipment is fully deenergized.
Type 2
Equipment is energized. Energized circuits are covered or insulated.
NOTE : Type 2 work includes tasks where the energized circuits are or
can be measured by placing probes through suitable openings in the
covers or insulators.
Type 3
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or
240 volt-amp in dry locations.
Type 4
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are greater than 30 volts rms, 42.4 volts peak, 60 volts dc, or 240
volt-amp in dry locations. Potential exposures to radio-frequency cur-
rents, whether induced or via contact, exceed the limits in Table A5-1
of Appendix 5 (SEMI S2 guideline).
Lock Out/ Tag Out procedure (Type 1 of
electrical work)
l Stop the pump with the remote control or with the stop button
(press on STOP button during 10s)
l Press on emergency stop button
l Switch off the main circuit breaker
l Switch off the customer’s power supply
l Switch off the water and nitrogen quick connections (inlet first,
then outlet)
l Put the label or warning board “Maintenance processing” on or
next to the pump
Safety Lockout procedure
l Take off the label or warning board “Maintenance processing”
l
Check the cooling liquid and oil levels according to the chapters
“Checking the oil level” and “Checking the cooling liquid level”
l
Switch on the main circuit breaker
l Release the emergency stop button
l Switch on the water and nitrogen quick connections (outlet first,
then inlet)
l Start the pump with the remote control (press on START button)
Emergency off circuit description
l The Emergency off circuit may be opened by pressing on
emergency stop button, or the thermal protection B1. If one of the
two elements show, then the pump will immediately stop. The PLC
will remain energized to save the pump status.
l If the emergency stop button was pressed, check the start up of
the pump then release this button to restart the pump. Press on
Start button on the remote control, the pump will restart.
l
If ok, check the wiring system from the terminal box motor to the
KDP1 contactor. If ok, call the BUSCH Semicon service team in
charge of the maintenance of the pumps.
BC 0200 F
Safety
0870767417 (En)
Page 7
Oil filling
CAUTION
Hot surface! Do not touch!
Safety advice on vacuum pump BC 0200 F