QSG_F670_363.00_EN_01_2021-02-09
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AIR QUALITY REQUIREMENTS
The air supplied into the device must be clean and dry. Even though the device is provided
with a filter, the presence of dust, oil or impurities may cause malfunction.
Air quality requirements according to ISO standard 8573
The air must be clean and dry.
The presence of impurities, oil or humidity in the air may cause deterioration which will not
be covered by the warranty.
When the instrument is working in vacuum conditions, impurities must be prevented from
being drawn into its internal components.
For this purpose, we strongly recommend that a suitable airtight filter is installed between
the part under test and the instrument.
ATEQ recommends the following characteristics for the air supplied into the device.
Recommended additional equipment
ATEQ recommends the installation of this additional equipment:
— Air dryer to provide dry air at less than - 40°C dew point
— 25 microns and 1/100 microns double filter
Air characteristics
ISO standard 8573 class
Grain size and concentration
0.1 μm and 0.1 mg/m
3
Class 1
Dew point under pressure
- 40°C dew
Class 2
Maximum concentration of oil
0.01 mg/m
3
Class 1
