Agilent Technologies E5100A, Programming Manual, Page: 324 / 373

Using E5100A/B Option 022
Y ou must use a program to use the trap function to control a deposition process .
A sample program is provided in the sample program disk. This chapter explains how to
measure a device using the sample program.
The sample program for the trap function is prepared under the following conditions .
A network test xture is used.
Characteristic impedance is set at 12.5 to support standard network test xture .
This sample program measures a device using the trap function on the channel 1. When the
program sees the resonant frequency of the resonator matching the nal trap frequency , it
switches the focus to the channel 2 to perform a frequency sweep and veries the resonant
frequency .
E5100A/B option 022 starts performing the trap function from the measured point at the
right of the screen. As deposition proceeds , the resonant frequency of resonator becomes
lower and the measured frequency goes from right to left. This is because the function waits
for the measured phase to go under 0 (actually the phase value specied by INPUTRAC ) at
the measured point so that it can output certain data to the I/O port and move to the next
measured point to repeat the process .
The more detailed description of the program function is discussed for the sample program
with its default setup . The default setup is completed between lines 1600 and 1910 in \The
Sample Program List". Please refer to this section for the setup . Figure G-2 describes the status
of the channel 1 with this setup .
Figure G-2. How E5100A/B option 022 W orks with the Default Setup
G-2 Option 022