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Agilent B1500A User’s Guide, Edition 10
4- 19
Specifications
Hardware
•
Measurement accuracy
Measurement accuracy at the measurement port of the MFCMU or the MFCMU
cable (1.5 m or 3.0 m)
•
|Z| accuracy: ± E (%)
•
accuracy: ± E/100 (radian)
•
C accuracy:
± E (%) at Dx
0.1
± E
(1+Dx
2
)
1/2
(%) at Dx > 0.1
•
D accuracy:
± E/100 at Dx
0.1
± E
(1+Dx)/100 at Dx > 0.1
•
G accuracy:
± E/Dx (%) at Dx
0.1
± E
(1+Dx
2
)
1/2
/Dx (%) at Dx > 0.1
where,
Zx: Impedance measurement value (
)
Dx: Measurement value of D
E = E
P
’ + (Z
S
’ / |Zx| + Y
O
’
|Zx| )
100 (%)
E
P
’ = E
PL
+ E
POSC
+ E
P
(%)
Y
O
’ = Y
OL
+ Y
OSC
+ Y
O
(S)
Z
S
’ = Z
SL
+ Z
OSC
+ Z
S
(
)
For the parameter value, see Table 4-11 to Table 4-13. Calculation example of
the measurement accuracy is also shown in Table 4-14.
Specification conditions:
•
Temperature: 23
C ± 5
C
•
Integration time: 1 PLC or 16 PLC
Summary of Contents for B1500A
Page 1: ...Agilent Technologies Agilent B1500A Semiconductor Device Analyzer User s Guide ...
Page 22: ...Agilent B1500A User s Guide Edition 10 Contents ...
Page 23: ...1 Getting Started ...
Page 41: ...2 Introduction ...
Page 74: ...2 34 Agilent B1500A User s Guide Edition 10 Introduction Measurement Units ...
Page 75: ...3 Installation ...
Page 132: ...3 58 Agilent B1500A User s Guide Edition 10 Installation About Plug in Modules ...
Page 133: ...4 Specifications ...
Page 179: ...5 Accessories and Options ...