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Agilent Technologies B1500A, User Manual

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Agilent Technologies

Agilent B1500A

Semiconductor Device 
Analyzer

User’s Guide

Summary of Contents for B1500A

Page 1: ...Agilent Technologies Agilent B1500A Semiconductor Device Analyzer User s Guide ...

Page 2: ...al damages in connec tion with the furnishing use or per formance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this...

Page 3: ...wing product standards EMC Standard IEC 61326 1 2005 EN 61326 1 2006 CISPR 11 2003 EN55011 1998 A1 1999 A2 2002 IEC 61000 4 2 2001 EN 61000 4 2 1995 A1 1998 A2 2001 IEC 61000 4 3 2002 A1 2002 EN 61000 4 3 2002 A1 2002 IEC 61000 4 4 2004 EN 61000 4 4 2004 IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 2001 IEC 61000 4 6 2003 EN 61000 4 6 1996 A1 2001 IEC 61000 4 11 2004 EN 61000 4 11 2004 Canada ICES NMB ...

Page 4: ...platz normaler Betrieb nach DIN 45635 T 19 Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa 70dB operator position normal operation per ISO 7779 NOTE This ISM device complies with Canadian ICES 001 Cet appareil ISM est conforme à la norme NMB 001 du Canada ...

Page 5: ...The protective features of this instrument may be impaired if it is used in a manner not specified in the operation instructions This instrument is an INDOOR USE product This instrument complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 61010 1 If an instrument is marked CAT I IEC Measurement Cate...

Page 6: ...ment and internal adjustments must be made by qualified maintenance personnel Do not replace components with power cable connected Under certain conditions hazardous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another per...

Page 7: ...osition In position of a bi stable push switch Out position of a bi stable push switch Hazardous voltage and potential for electrical shock Do not touch terminals that have this symbol when the equipment is on Hot surface Avoid contact Surfaces are hot and may cause personal injury if touched Instruction manual symbol The equipment will be marked with this symbol when it is necessary for the user ...

Page 8: ...ltage Current Measurement Safety Multimeters and other instruments capable of measuring high voltages and currents are subject to specific safety concerns because of the circuits to which they may be connected To safely use these instruments you need to understand the markings on the instrument near the input terminals which include the Protection Limits and the IEC Measurement Category Protection...

Page 9: ...inal of a device under test for the Kelvin connection which is effective for high current measurement and low resistance measurement For the non Kelvin connection to ease the connections connect Force only Do not connect Sense It must be opened Guard should be extended to around the device terminal for reducing leakage current caused by a coaxial cable used Guard must be never connected to anythin...

Page 10: ...onnect the interlock circuit to the Interlock terminal of this instrument Confirm periodically that the interlock function works normally Before touching the connections of the Force Guard and Sense terminals turn the instrument off and discharge any capacitors of the measurement path If you do not turn the instrument off complete all of the following items regardless of any instrument s settings ...

Page 11: ...is mit dem Interlock Anschluss dieses Instruments Prüfen Sie in regelmäßigen Abständen dass die Verriegelungsfunktion ordnungsgemäß funktioniert Bevor Sie die Verbindungen zu den Anschlüssen Force Guard und Sense berühren schalten Sie das Instrument aus und entladen alle Kondensatoren des Messwegs Wenn Sie das Instrument nicht ausschalten führen Sie unabhängig von den Instrumenteinstellungen alle ...

Page 12: ...porte Avant de procéder aux mesures connectez le circuit de sécurité à la borne Interlock de l instrument Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité Avant de toucher les connexions des bornes Force Guard et Sense mettez l instrument hors tension et déchargez tout condensateur du chemin de mesure Si vous ne mettez pas l instrument hors tension effectuez toutes les opéra...

Page 13: ...できるシールド ボックスを用意してく ださい 測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく ださい インターロック機能が正常であることを定期的に確認してください Force Guard Sense 端子に繋がる接続部に触れる前には 本器の電源を切断し てください また 測定系のキャパシタを放電してください 電源を切らない 場合は 以下の事項を全て実施してください Stop キーを押して Measurement インジケータが消灯したことを確認してくだ さい 高電圧警告 High Voltage インジケータが消灯していることを確認してく ださい シールド ボックスのドアを開けてください Interlock 端子を開放してくだ さい キャパシタが SMU に接続されているならば キャパシタを放電してくださ い 周囲のほかの作業者に対しても 高電圧危険に...

Page 14: ... a liquid crystal display LCD backlighting for the LCD is provided by a fluorescent lamp which contains mercury and must be managed recycled and or disposed in accordance with all applicable laws ordinances and regulations For information on how to recycle or dispose of the fluorescent lamp contained in your own product visit the following website http www agilent com environment mercury shtml If ...

Page 15: ... About Windows XP application programs and peripherals including driver Using commercial products on Agilent B1500A is your responsibility Agilent Technologies cannot provide compatibility information for commercial products If problems arise perform Agilent B1500A system recovery About servicing Bench repair service is available at your nearest Agilent Technologies service center Be aware that th...

Page 16: ...nd safety are our primary concern we strongly recommend that you use the instrument in accordance with established ergonomic principles and recommendations Scientific literature suggests that there may be a relationship between injury to soft tissues especially in the hands and arms and prolonged improper use of keyboards or other equipment requiring repeated motions of the hands and forearms This...

Page 17: ... If you use your thumb to rotate the ball on a trackball or spaceball keep it in a relaxed natural shape and maintain a neutral posture in your hand wrist and forearm Hold the mouse gently by draping your fingers over it Keep your hand relaxed and fingers loose Do not grip the mouse tightly It takes very little pressure or force from your fingers to activate the buttons or scroll wheel on your mou...

Page 18: ...pecifications of Agilent B1500A Chapter 5 Accessories and Options This chapter describes accessories and options of Agilent B1500A NOTE To get the latest firmware software electronic manuals support information visit Agilent Technologies support site http www home agilent com and click Oscilloscopes Analyzers Meters Parametric Device Analyzers Curve Tracers You can reach the support site for the A...

Page 19: ...pace Exists 1 7 To Create Workspace 1 8 To Select Workspace 1 9 To Use Tracer Test Mode 1 10 To Use Application Test Mode 1 12 To Use Classic Test Mode 1 14 To Perform Measurement 1 16 To Use Test Result Editor 1 17 To Use Analysis Tools 1 18 2 Introduction Overview 2 3 Agilent EasyEXPERT Software 2 6 Front View 2 8 Rear View 2 11 2 12 2 13 2 14 2 15 2 16 Measurement Units 2 17 ...

Page 20: ...ements 3 3 Operating Environment 3 3 Storaging Shipping Environment 3 3 Installation Requirements 3 4 Power Cable 3 4 Inspection and Installation 3 6 To Inspect B1500 and Accessories 3 6 To Perform Initial Setup 3 7 To Change Windows Logon Setting 3 9 To Change GPIB Address 3 9 To Enable System Controller 3 10 Installing Accessories 3 11 To Connect 16442B Test Fixture B1500A A5F 3 12 To Connect Co...

Page 21: ...Using Test Fixture 3 41 Using Connector Plate 3 43 Capacitance Compensation When Using Switching Matrix 3 47 Required Conditions 3 48 To Create Compensation Data File 3 50 Maintenance 3 55 Cleaning 3 55 Self test and Diagnostics 3 55 Calibration 3 55 3 55 About Plug in Modules 3 56 Module Type and Locations 3 57 4 Specifications Hardware 4 3 EasyEXPERT Software 4 36 Desktop EasyEXPERT Software 4 4...

Page 22: ...Agilent B1500A User s Guide Edition 10 Contents ...

Page 23: ...1 Getting Started ...

Page 24: ...will not connect device under test Open all measurement terminal This chapter consists of the following sections To Turn On Off B1500A To Launch EasyEXPERT To Use Tracer Test Mode To Use Application Test Mode To Use Classic Test Mode To Perform Measurement To Use Analysis Tools NOTE If you use the B1500A at the first time If this is the first time to turn Agilent B1500 on after the delivery you ne...

Page 25: ...syEXPERT is launched within the B1500A boot up process If the function is off EasyEXPERT is not launched and the Start EasyEXPERT button is displayed To turn the automatic start function off use the Start EasyEXPERT window displayed by the File Exit menu on the EasyEXPERT main screen And remove the check from the Option Auto Start of EasyEXPERT menu NOTE If EasyEXPERT does not run Launch Agilent C...

Page 26: ...Standby switch lower right corner of the front panel Windows measurement module initialization and self calibration will start For the Windows logon screen log on Windows After logging on the Start EasyEXPERT button will be displayed on the screen or EasyEXPERT will be launched if the automatic start function is on To Turn B1500A Off Press the Standby switch lower right corner of the front panel W...

Page 27: ...e B1500A in the standby state LCD Off Enables or disables the LCD panel LED lights when the LCD is disabled Auto Menu Four keys are available for the display adjustment Press Auto to perform adjustment automatically Use and Menu to adjust manually Agilent B1500A also requires Agilent EasyEXPERT software as its graphical user interface You can operate Agilent EasyEXPERT by using the touch panel Use...

Page 28: ...etup test result data and so on The workspace can be created and allocated for each user 2 If this is the first time to start the EasyEXPERT or if no workspace exists a workspace will be created automatically Skip to To Use Tracer Test Mode on page 1 10 To Use Application Test Mode on page 1 12 or To Use Classic Test Mode on page 1 14 3 If only one workspace exists the B1500A displays the screen a...

Page 29: ...sic Test Mode on page 1 14 2 If you want to create a workspace select the No radio button and click Next The B1500A displays the screen as shown in Figure 1 2 Skip to To Create Workspace on page 1 8 Figure 1 1 If Only One Workspace Exists NOTE Work on the same setups and data in the next time If this check box is checked the workspace selection screen will be skipped at the next startup and EasyEX...

Page 30: ...o create a public workspace that is opened for all users 2 If you are the owner of the existing workspace you can change the name of the existing workspace If you want to rename the existing workspace enter the name into the below entry field Check Allow other users to access this workspace box if you want to set it to a public workspace that is opened for all users 3 Click OK Skip to To Use Trace...

Page 31: ... button 2 Click Demo Workspace to select it 3 Click Continue Skip to To Use Tracer Test Mode on page 1 10 To Use Application Test Mode on page 1 12 or To Use Classic Test Mode on page 1 14 Figure 1 3 To Select Workspace NOTE Choose the same Workspace in the next time If this check box is checked the workspace selection screen will be skipped at the next startup and EasyEXPERT will be launched with...

Page 32: ...w the graph as shown in Table 1 2 To enter the value use the USB keyboard or the screen numeric keyboard opened by clicking the right button of the entry field To start measurement click for the single measurement or for the repeat measurement If the Stop field is highlighted the range of measurement and graph display can be changed by using the rotary knob during the repeat measurement Table 1 1 ...

Page 33: ...Mode Table 1 3 I V Trace Measurement Setup Figure 1 4 Display Example of I V Trace Screen VAR1 CONST Mode LIN SGL Unit SMU2 Start 0 V Source 0 V Stop 1 V Compliance 5 mA Step 10 mV NOS 101 Interlacing 1 Compliance 5 mA Pwr Comp OFF Meas Time 2 us Dual Polarity ON Step Time 500 us ...

Page 34: ...he tab is in the leftmost column on the screen 2 Set the Category field For example check the CMOS only The Library field lists the test definitions 3 Select a test definition at the Library field For example click the Id Vg and Select button sequentially The screen changes the display as shown in Figure 1 6 4 Change the measurement conditions at the Test Parameters field The following example cha...

Page 35: ...tions Test definitions are the built in test setups that have been defined and stored in the EasyEXPERT as the application library The EasyEXPERT contains more than two hundred test definitions You can execute the test without modifications Also you can create your own test setup definition by making any changes All furnished test definitions are just sample Agilent Technologies is NOT LIABLE for ...

Page 36: ...and Select button sequentially The I V Sweep Channel Setup screen is displayed See Figure 1 7 3 Set the Channel Setup parameters as shown in Table 1 4 4 Click the Measurement Setup tab and set the parameters as shown in Table 1 5 5 Click the Display Setup tab and set the parameters as shown in Table 1 6 To enter the value use the USB keyboard or the screen numeric keyboard opened by clicking the r...

Page 37: ...ULSE for the current output and volt age measurement Set V VPULSE or COMMON for the voltage output and current measurement Function SMU1 V1 I1 V VAR1 SMU2 V2 I2 V CONST VAR1 Timing Constants Unit SMU1 Hold 0 s Unit SMU2 Name V1 Delay 0 s V Name V2 Direction Single I Name I2 Linear Log LINEAR Mode V Start 0 V Source 0 V Stop 1 V Compliance 100 mA Step 10 mV No of Step 101 Compliance 100 mA Pwr Comp...

Page 38: ...dow For the measurement after performing To Use Classic Test Mode on page 1 14 you will have the test result as shown in Figure 1 8 This is the leakage current measurement result because all measurement terminal is opened for performing the procedures described in this chapter 2 If the automatic data record function has been set to ON Auto Record ON Test Result Editor appears on the lower area of ...

Page 39: ...records in Delete group can be listed when Results Filter Show Deleted Data is checked Flags buttons The following buttons are available You can set one of the following flags Important button Sets the important flag to the test result record Valid button Sets the valid flag to the test result record Questionable button Sets the questionable flag to the test result record Remarks field You can ent...

Page 40: ...u used to display and control the cursor Line menu used to display and control the lines When the marker cursor and lines are effective their parameters are also displayed on the X Y Graph Plot area Figure 1 9 is an example displaying marker tangent line and regression line on the test result graph shown in Figure 1 8 You can read position of the marker and the active cursor and interrupt and grad...

Page 41: ...2 Introduction ...

Page 42: ...ins an application library that is a set of test definitions The application test can be performed by selecting a test definition and setting the test condition for the actual DUT device under test All test definitions are just sample If the samples damage your devices Agilent Technologies is NOT LIABLE for the damage NOTE Utility The following utility programs sample are stored in the folder C Pr...

Page 43: ...citance voltage sweep measurement for example by one instrument Agilent B1500A also provides an intuitive graphical user interface touch screen LCD panel keyboard and mouse for easy and effective measurement and analysis on the Microsoft Windows environment You can analyze a measurement result characteristics graph for example by using several tools such as markers cursors and lines Also in the GP...

Page 44: ... High resolution source monitor unit module Occupies one slot Needs Agilent E5288A ASU to perform atto level current measurement or automatic switching of the measurement resource connection MFCMU module Multi frequency capacitance measurement unit module Occupies one slot Needs Agilent N1301A 100 SCUU to perform automatic switching of the measurement resource connection SPGU module High voltage s...

Page 45: ...ket module universal socket modules two types blank Teflon board and connection wires for device connection Agilent 16445A selector adapter Used to connect the 16440A selector B1500A A04 to the B1500A Two selectors can be connected Agilent E5288A ASU Atto sense and switch unit ASU Used to enable the 1 pA range for the atto level current measurement also switch the measurement resource connected to...

Page 46: ... cursors and lines and auto analysis Data import export capability data output by CSV XML format and graph output by EMF BMP GIF PNG format Maintenance self test and self calibration The EasyEXPERT has the following measurement execution environments Application test Classic test Tracer test Quick test Application Test The EasyEXPERT contains an application library that supports typical measuremen...

Page 47: ...eep SPGU Control Switching Matrix Control Direct Control The Direct Control test mode is used to control the measurement modules directly by using the B1500A GPIB control commands and perform measurement For the control commands see Programming Guide Tracer Test Curve tracer test mode This test allows you to perform the high speed I V measurement on one screen The Tracer Test screen provides GUI f...

Page 48: ...ng the B1500A on Open the measurement terminals at the device side when turning the B1500A on Also disconnect the device from the measurement terminals and open the measurement terminals after the measurement If you leave the connection with the device the device may be damaged by unexpected operations or charge up of measurement cables 2 HDD access indicator This green LED lights in the access st...

Page 49: ...he Windows screen Agilent EasyEXPERT software window and so on Touch screen operation is available when the Touch Panel Off indicator does not light NOTE About screen adjustment If you find swinging or flickering in screen while you use this instrument perform the screen adjustment In most cases the symptoms can be resolved by pressing the Auto button below the LCD panel The Auto button is used to...

Page 50: ... update or data transfer 12 Touch Panel Off key Works on Agilent EasyEXPERT environment Enables or disables the touch screen operation The green LED lights when the touch screen is disabled NOTE To disable the touch panel Use Touch Panel Device Properties and remove the check from the Enabled box on the Advanced tab screen The Touch Panel Device Properties dialog box can be opened by selecting Gun...

Page 51: ...gilent Technologies telephone assistance program 2 LED status indicator For troubleshooting Followings are some examples Both LEDs turn off B1500A is in the standby state and Standby switch is OFF position One LED turns green Power supply works normally Both LEDs turn orange B1500A is in the standby state and Standby switch is ON position 1 9 8 7 C D D D E 5 3 4 10 13 11 12 6 2 B D D D A ...

Page 52: ...U 7 SPGU 12 WGFMU 10 For example if the B1500A installs two HPSMU one CMU and two WGFMU the total rating is 2 14 7 2 10 55 For each module see Measurement Units on page 2 17 Also there is a rule for the installation order by the module type See Chapter 3 Installation 6 Circuit Common and Frame ground terminals Normally connect the terminals together by using the shorting bar Agilent part number 50...

Page 53: ...re rebooting the B1500A and connect the power cable again and then turn the B1500A on 11 Ext Trig terminals Two BNC connectors one for trigger input and one for trigger output For details about the trigger function see Programming Guide 12 Digital I O terminal DSUB 25 pin connector Can be used for the trigger input output terminals or an interface to control an external relay circuit and so on For...

Page 54: ... and Output 2 terminals and the following terminals to synchronize the operation between SPGUs or with an external equipment Ref Out Sync Out Connect to the Ref In Sync In of the slave SPGU Ref In Sync In Connect to the Ref Out Sync Out of the master SPGU Trig Out Connect to the trigger input terminal of the equipment synchronized with the SPGU output CAUTION Connect the Ref Out In Sync Out In and...

Page 55: ...erminals to the specified terminal properly Connecting to the other terminal may result in damage to the WGFMU Connect the connection cable between the WGFMU and the RSU remote sense and switch unit before turning the B1500A on Changing the cable connection in the power on state may damage the WGFMU and RSU See Agilent B1530A User s Guide for cable connection and usage D SMU module The source moni...

Page 56: ...inals turn the B1500A off and discharge any capacitors If you do not turn the B1500A off complete all of the following items regardless of the B1500A settings Press the Stop key to set the module output off Confirm that the High Voltage indicator is not lit Open the shielding box access door open the Interlock terminal Discharge any capacitors connected to an SMU e Warn persons working around the ...

Page 57: ...XPERT User s Guide for the functions available for Agilent EasyEXPERT software See Programming Guide for the functions available for the GPIB remote mode See Agilent B1530A User s Guide for using the WGFMU GNDU Ground Unit Agilent B1500A is equipped with the ground unit GNDU The GNDU is a 0 V constant voltage source and used for the reference of measurement ground Also the GNDU can sink up to 4 2 ...

Page 58: ...e Apply voltage and measures voltage Apply current and measures current NOTE To select the SMU operation mode in the GPIB remote condition enter the CMM command Figure 2 2 Simplified SMU Circuit Diagram Compliance The SMU has a compliance feature that limits output voltage or current to prevent damage to the device under test When the SMU applies voltage you can specify current compliance When the...

Page 59: ...fication of the high power source monitor unit HPSMU for Agilent B1500A Maximum four modules can be installed in one mainframe Maximum voltage current output power 200 V 1 A 20 W Minimum range 2 V 1 nA Output measurement value and resolution see Table 2 1 to Table 2 4 Figure 2 3 HPSMU Output and Measurement Ranges 9ROWDJH 9 XUUHQW P ...

Page 60: ...2 mV 500 mA 100 V 0 V 100 V 5 mV 125 mA 200 V 0 V 200 V 10 mV 50 mA Range Output Value Setting Resolution Maximum Voltage 1 nA 0 I 1 15 nA 50 fA 200 V 10 nA 0 I 11 5 nA 500 fA 200 V 100 nA 0 I 115 nA 5 pA 200 V 1 A 0 I 1 15 A 50 pA 200 V 10 A 0 I 11 5 A 500 pA 200 V 100 A 0 I 115 A 5 nA 200 V 1 mA 0 I 1 15 mA 50 nA 200 V 10 mA 0 I 11 5 mA 500 nA 200 V 100 mA 0 I 50 mA 5 A 200 V 50 mA I 115 mA 5 A ...

Page 61: ...V 0 V 110 V 5 mV 100 V 200 V 0 V 200 V 10 mV 200 V Range Measurement Value a a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value Measurement Resolutions High Speed ADC High Resolution ADC 1 nA 0 I 1 15 nA 50 fA 10 fA 10 nA 0 I 11 5 nA 500 fA 10 fA 100 nA 0 I 115 nA 5 pA 100 fA 1 A 0 I 1 15 A 50 pA 1 pA 10 A 0 I ...

Page 62: ...n describes typical specification of the medium power source monitor unit MPSMU for Agilent B1500A Maximum voltage current output power 100 V 100 mA 2 W Minimum range 0 5 V 1 nA Output measurement value and resolution see Table 2 5 to Table 2 8 Figure 2 4 MPSMU Output and Measurement Ranges 9ROWDJH 9 XUUHQW P ...

Page 63: ... mA 20 V 0 V 20 V 1 mV 100 mA 40 V 0 V 20 V 2 mV 100 mA 20 V V 40 V 2 mV 50 mA 100 V 0 V 20 V 5 mV 100 mA 20 V V 40 V 5 mV 50 mA 40 V V 100 V 5 mV 20 mA Range Output Value Setting Resolution Maximum Voltage 1 nA 0 I 1 15 nA 50 fA 100 V 10 nA 0 I 11 5 nA 500 fA 100 V 100 nA 0 I 115 nA 5 pA 100 V 1 A 0 I 1 15 A 50 pA 100 V 10 A 0 I 11 5 A 500 pA 100 V 100 A 0 I 115 A 5 nA 100 V 1 mA 0 I 1 15 mA 50 n...

Page 64: ... V 0 V 22 V 1 mV 20 V 40 V 0 V 44 V 2 mV 40 V 100 V 0 V 100 V 5 mV 100 V Range Measurement Value a a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value Measurement Resolutions High Speed ADC High Resolution ADC 1 nA 0 I 1 15 nA 50 fA 10 fA 10 nA 0 I 11 5 nA 500 fA 10 fA 100 nA 0 I 115 nA 5 pA 100 fA 1 A 0 I 1 15 ...

Page 65: ...al specification of the high resolution source monitor unit HRSMU for Agilent B1500A Maximum voltage current output power 100 V 100 mA 2 W Minimum range 0 5 V 10 pA 1 pA when the E5288A ASU is used Output measurement value and resolution see Table 2 9 to Table 2 12 Figure 2 5 HRSMU Output and Measurement Ranges 9ROWDJH 9 XUUHQW P ...

Page 66: ...A 100 V 0 V 20 V 5 mV 100 mA 20 V V 40 V 5 mV 50 mA 40 V V 100 V 5 mV 20 mA Range Output Value Setting Resolution Maximum Voltage 1 pA a a Available when the E5288A Atto Sense and Switch Unit ASU is used 0 I 1 15 pA 1 fA 100 V 10 pA 0 I 11 5 pA 5 fA 100 V 100 pA 0 I 115 pA 5 fA 100 V 1 nA 0 I 1 15 nA 50 fA 100 V 10 nA 0 I 11 5 nA 500 fA 100 V 100 nA 0 I 115 nA 5 pA 100 V 1 A 0 I 1 15 A 50 pA 100 V...

Page 67: ...ment Value a a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum measurement value is Range column value Measurement Resolutions High Speed ADC High Resolution ADC 1 pA b b Available when the E5288A Atto Sense and Switch Unit ASU is used 0 I 1 15 pA 100 aA 100 aA 10 pA 0 I 11 5 pA 1 fA 1 fA 400 aA b 100 pA 0 I 115 pA 5 fA 2 fA 500 aA b 1 nA 0 I 1 15 n...

Page 68: ...nt EasyEXPERT User s Guide NOTE Before using 1 pA range The measurement channel connected to the ASU supports the 1 pA range To use the 1 pA range set the 1 pA fixed range or the 1 pA limited auto ranging The B1500A automatically performs the compensation of the data measured by the 1 pA range and returns the compensated data You can use either the pre stored offset data or the pre measured offset...

Page 69: ...z 10 kHz to 0 1 Hz 100 kHz to or 1 Hz 1 MHz to 5 MHz AC signal output level 10 mVrms to 250 mVrms 1 mV resolution DC bias 0 to 25 V using MFCMU internal DC bias 0 to 100 V using SMU and SCUU SMU CMU unify unit Measurement range For the fixed ranging mode measurement range impedance range must be specified to perform measurement Table 2 14 shows the available measurement ranges and the correspondin...

Page 70: ...l capacitance F D dissipation factor Cp parallel capacitance F Q quality factor Cp parallel capacitance F Rp parallel resistance Cs series capacitance F Rs series resistance Cs series capacitance F D dissipation factor Cs series capacitance F Q quality factor Lp parallel inductance H G conductance S Lp parallel inductance H D dissipation factor Lp parallel inductance H Q quality factor Lp parallel...

Page 71: ...z 0 Z 100 50 50 50 100 Z 300 100 100 100 300 Z 1 k 300 300 300 1 k Z 3 k 1 k 1 k 1 k 3 k Z 10 k 3 k 3 k 3 k 10 k Z 30 k 10 k 10 k 30 k Z 100 k 30 k 30 k 100 k Z 300 k 100 k 300 k Z 300 k 10 n7 100 n7 1 M7 10 M7 100 M7 1 m7 10 m7 100 m7 1 7 10 7 100 7 1 k7 10 k7 100 k7 1 M7 10 M7 100 M7 1 G7 10 G7 100 G7 1 T7 10 T7 1 kHz 10 kHz 100 kHz 1 MHz 5 MHz Frequency f Impedance Z 10 MF 100 MF 1 mF 10 mF 100...

Page 72: ...sequence count ALWG mode PG output mode 2 level pulse or 3 level pulse for each channel Pulse timing parameters programmable range Period 20 ns to 10 s 10 ns resolution Width 10 ns to period 10 ns resolution 2 5 ns or 10 ns transition time 8 s Delay 0 to period 20 ns resolution 2 5 ns or 10 ns transition time 8 s Transition time leading time or trailing time 8 ns to 400 ms resolution 2 ns or 8 ns ...

Page 73: ...rement range 1 A 10 A 100 A 1 mA or 10 mA Operation mode PG mode Fast IV mode or DC mode PG mode ALWG arbitrary linear waveform generator voltage output and voltage measurement VFVM Output level 5 V to 5 V for open load or 2 5 V to 2 5 V for 50 load Minimum pulse width 100 ns Fast IV mode ALWG voltage output and current or voltage measurement VFIM or VFVM Output level 0 to 10 V 0 to 10 V or 5 V to...

Page 74: ...2 34 Agilent B1500A User s Guide Edition 10 Introduction Measurement Units ...

Page 75: ...3 Installation ...

Page 76: ... precautions must be observed during the use of the B1500A Use a three conductor AC power cable to connect the cabinet if used and the B1500A to an electrical ground safety ground If you do not use the 16442B test fixture B1500A A5F you must install and connect an interlock circuit that opens the Interlock terminal when the shielding box access door is opened Confirm periodically that the interloc...

Page 77: ...AC power source supplying 90 to 264 V at 47 to 63 Hz The maximum power consumption is 900 VA Operating Environment The B1500A is specified to operate within the following environmental conditions Temperature 5 C to 40 C Humidity 20 to 70 RH non condensing Altitude 0 to 2 000 m 6 561 ft Storaging Shipping Environment The B1500A is specified to store ship within the following environmental condition...

Page 78: ...ndards this instrument is equipped with a three prong power cable When connected to an appropriate AC power outlet this cable grounds the instrument frame The type of power cable shipped with each instrument depends on the country of destination Refer to PN in the following table for Agilent part numbers of the power cables available If the plug on the cable does not fit the power outlet or the ca...

Page 79: ...SR 107 2 D1 250 V 10 A PN 8120 2956 Plug IS 1293 and IS 6538 250 V 10 A PN 8120 4211 Plug JIS C 8303 125 V 12 A PN 8121 0743 Plug Israel SI 32 250 V 10 A PN 8120 5182 Plug IRAM 2073 10A 250 V 10 A PN 8120 6870 Plug CEI 23 16 250 V 10 A PN 8120 6978 Plug GB 1002 figure 3 250 V 10 A PN 8120 8376 Plug SANS 164 1 250 V 10 A PN 8120 4211 8121 0564 Plug TISI 166 250 V 10 A PN 8121 1866 Plug NBR 14136 25...

Page 80: ...he GPIB address of the B1500A see To Change GPIB Address on page 3 9 To allow the B1500A EasyEXPERT to control external GPIB devices see To Enable System Controller on page 3 10 To Inspect B1500 and Accessories Perform the following inspections when the B1500A and accessories arrive at your site 1 Before unpacking any components inspect all boxes for any signs of damage that might have occurred du...

Page 81: ... Welcome to Microsoft Windows screen On the screen select the Next button 7 For the message How should dates and currency appear set as follows I live closest to this region for example United States I type mostly in this language for example English I use this type of keyboard for example US If you use the 16444A 001 USB keyboard select US 8 Select the Next button 9 For the message What time zone...

Page 82: ...e initial setup If you set it do not forget it Pre defined users Administrator Agilent B1500 User and AgilentOnly You can add users after the initial setup Add users as you need Agilent B1500 User is the account for automatic logon Password is not set to this account AgilentOnly is the account for Agilent service personnel Do not delete this account This account is password protected NOTE Other Wi...

Page 83: ... to 17 To change the GPIB address perform the following procedure 1 If the EasyEXPERT software is running terminate it as shown below a Select the menu function File Exit on the EasyEXPERT main screen b Click x at the upper right corner of the Start EasyEXPERT button 2 Select All Programs Agilent IO Libraries Suite Agilent Connection Expert from the Start menu Agilent Connection Expert window appe...

Page 84: ...rface GPIB0 window appears 4 Set the GPIB Address value to 21 that is the typical address number for the system controller 5 Check the System Controller box 6 Remove the check from the Auto discover instruments connected to this interface box This disables the automatic device detection So the Connection Expert cannot detect the instruments connected to the GPIB interface by itself 7 Click the OK ...

Page 85: ...cable or the CMU cable to the MFCMU WARNING There are potentially hazardous voltages of up to 100 V MPSMU HRSMU or 200 V HPSMU at the Force Sense and Guard terminals To prevent electrical shock do not expose these lines WARNING To prevent electrical shock during use install an interlock circuit see page 3 29 and connect the Interlock cable see page 3 16 CAUTION The GNDU can sink current of up to 4...

Page 86: ...se the cables shown in Table 3 1 to connect from the B1500A connectors to the 16442B s relative connectors NOTE Making non Kelvin connection The Force terminals can be used to force and measure DC voltage or current If you want to simplify the cable connections open the Sense terminals and connect the Force terminals only to the test fixture by using the triaxial cables If you make the Kelvin conn...

Page 87: ...MU3 SMU Force SMU4 SMU Force SMU5 SMU Force SMU6 SMU Force Agilent 16493P SPGU Cable 3 m or 1 5 m PGU1 SPGU Output 1 PGU2 Output 2 Agilent N1300A CMU Cablea 3 m or 1 5 m a To extend the four terminal pair 4TP connection to the 16442B inputs connect the Hcur and Hpot cables together and the Lcur and Lpot cables together by using the BNC T type adapter female female male Agilent part number 1250 240...

Page 88: ... be used to force and measure DC voltage or current If you want to simplify the cable connections open the Sense terminals and connect the Force terminals only to the connector plate by using the triaxial cables If you make the Kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the device under test minimizes the measurement error ...

Page 89: ... 1 to 6 16495J provides the inputs 1 to 8 odd number or even number SMU Force Agilent 16493P SPGU Cable 3 m or 1 5 m 16495H provides the inputs 7 to 12 16495J provides the inputs 9 to 12 odd number or even number SPGU Output 1 Output 2 Agilent N1300A CMU Cableb 3 m or 1 5 m 16495H provides the inputs 7 to 12 16495J provides the inputs 9 to 12 b To extend the four terminal pair 4TP connection to th...

Page 90: ...is open the B1500A cannot force high voltage more than 42 V When using the 16442B test fixture B1500A A5F connect the Interlock connectors together using the 16493J interlock cable If you use the 16495F G H J connector plate your own connector plate or your own test fixture make an interlock circuit as shown in To Make an Interlock Circuit on page 3 29 Then connect the B1500A Interlock connector t...

Page 91: ...rober vender The prober vender will have the solutions Dimensions of the ASU are 132 mm W 88 5 mm H 50 mm D excluding the connectors Figure 3 1 Image of ASU Installation Required parts Agilent 16495K Connector plate Agilent 16493M ASU cable Agilent N1300A CMU cable or Agilent 16048D E test leads Agilent N1254A 108 Magnet stand BNC cable coaxial cable manipulator wire and so on To install 16495K Fi...

Page 92: ...e to the CMU cur AUX In terminal And open the CMU pot terminal or cover it by using the BNC open cap 4 Adjust the cable length in the shielding box and catch in the cables by using the cover of the 16495K 5 Connect the cable extended from the DUT interface to the ASU output terminal For the non Kelvin connection open the Sense terminal or cover it by using the triaxial open cap To connect B1500A 1...

Page 93: ...ct ASU Figure 3 3 To Set Shorting Bar 08 5HWXUQ 8 RPPRQ 7R 87 7R 08 RUFH S F VXE 7R 608 7R 08 RUFH S F VXE 7R 608 7R 87 08 5HWXUQ 8 RPPRQ RUFH 08 8 6HQVH 08 FXU 8 Q 08 SRW RUFH URP 608 68 08 FXU 8 Q 08 SRW RUFH URP 608 68 RUFH 08 8 6HQVH CMU cur AUX In SMU Force Shorting bar AUX SMU Force b c 5 8 6 9 ...

Page 94: ...r the 4284A use the 16048D E test leads It is ok to leave open the ground wire extended from the cable 4 Connect the high potential Hp cable of the test leads to the ASU 1 CMU pot terminal 5 Connect the high current Hc cable to the ASU 1 CMU cur AUX In terminal The shorting bar is fixed to the ASU 1 by the step 5 and 6 6 Connect the triaxial cable from the HRSMU 1 Force terminal to the ASU 1 Force...

Page 95: ...pedance measurement NOTE For the installation of the SCUU GSWU and the connection to the DUT interface probe card manipulators and so on contact your favorite prober vender The prober vender will have the solutions Dimensions of the SCUU are 148 mm W 75 mm H 70 mm D Dimensions of the GSWU are 33 2 mm W 41 5 mm H 32 8 mm D Figure 3 4 Image of GSWU Installation Required parts Agilent 16495K Connecto...

Page 96: ...quired It is the plate that has the mechanism to block the light from the cable hole used to pass the cables in the shielding box Before starting 1 GSWU is furnished with wires 2 ea for the connection between the GSWU and the DUT interface Guard terminal If it is too short to connect them prepare additional wire 2 Turn the B1500A off Figure 3 5 To Connect SCUU GSWU XDUG 87 7R 08 VORW 1 RUFH S F 6H...

Page 97: ...ace See Figure 3 5 For the Kelvin connections also connect the proper cables from Sense1 and Sense2 to the 16495 connector plates or the DUT interface 6 Connect the wires furnished 2 ea to the GSWU 7 Connect one of the wires to the Guard terminal extended from CMUH of SCUU Then the wire should contact the Guard terminal as close to the device as possible 8 Connect another one to the Guard terminal...

Page 98: ... the shielding box pass the GSWU cable through the cable hole of the 16495K 6 Adjust the cable length in the shielding box and catch in the cables by using the cover of the 16495K 7 Connect the proper cables from Force1 CMUH and Force2 CMUL to the 16495 connector plates or the DUT interface See Figure 3 5 For the Kelvin connections also connect the proper cables from Sense1 and Sense2 to the 16495...

Page 99: ...nel then connect a Kelvin triaxial cable to extend the GNDU terminal Maximum current is restricted when the Kelvin triaxial cable is used See Table 3 4 Figure 3 6 Agilent N1254A 100 GNDU to Kelvin Adapter Table 3 4 Kelvin Triaxial Cable and Maximum Current Model No or Option Item Description Maximum Current 16493K 001 1 5 m Kelvin Triaxial Cable 3 0 A 16493K 002 3 m Kelvin Triaxial Cable 2 6 A XDO...

Page 100: ...ible to perform the synchronous output by the multiple SPGU channels In this figure the master SPGU is the module which outputs the reference signal and the slave SPGUs are the modules which follow to the reference signal The Trig Out terminal must be connected to the trigger input terminal of the external equipment to make the synchronized operation of it CAUTION Connect the Ref Out In Sync Out I...

Page 101: ... yourself This section contains information on connector hole dimensions To mount connectors 1 Select the appropriate parts for your application See Table 3 5 2 Make the holes and mount the connectors See Table 3 6 For Kelvin connections use Agilent 16493K Kelvin triaxial cable The Kelvin triaxial cable requires a Kelvin triaxial connector which has two connector holes and three screw holes 3 Buil...

Page 102: ...Switch 1450 0641 LED VF 2 1 V IF 10 mA 8150 5680 Wire 24 AWG 600 V 150 C Connecting GNDU to DUT 1250 2457 Triaxial Connector female 8121 1189 or 8150 2639 Coaxial Cable or Wire Connecting SMU to DUT 1250 2457 Triaxial Connector female 8121 1191 Low Noise Coaxial Cable Connecting MFCMU to DUT 1250 0118 BNC Connector female 8120 0367 Coaxial Cable 50 8150 0447 Wire Kelvin Triaxial Connector in mm Tr...

Page 103: ... circuit on a shielding box to prevent hazardous voltages when the door of the shielding box is open Figure 3 8 shows the pin assignments of the interlock connector that should be mounted on a connector plate or test fixture Figure 3 8 Interlock Connector Pin Assignments WARNING Potentially hazardous voltages may be present at the Force Guard and Sense terminals when the interlock terminals are sh...

Page 104: ...ensions of the LED see Figure 3 9 3 Use wire to connect the two switches in series between pin number 1 and 2 or 3 of the interlock connector See Figure 3 8 4 Use wire to connect the LED between pin number 4 and 5 or 6 of the interlock connector See Figure 3 8 If Agilent B1500A Interlock connector is connected to the interlock circuit Agilent B1500A SMU cannot force more than 42 V when the door is...

Page 105: ...lation Mounting Connectors Figure 3 10 Dimensions of the Interlock Switch Agilent part number 3101 0302 Figure 3 11 Dimensions of the Interlock Switch Agilent part number 3101 3241 1 12 20 0D 6ZLWFK RII 6ZLWFK RQ 8QLWV PP 6ZLWFK RII 6ZLWFK RQ 8QLWV PP ...

Page 106: ...el the effects of cable resistance connect the Sense line and Force line as close as possible to the terminal of the DUT Short the Sense and Force on the connector as shown below Measurement data will include the residual resistance of the connection wire Use AWG 22 single strand insulated wire Agilent part number 8150 2639 from the connector plate to the prober socket or DUT For a quick connectio...

Page 107: ...ard terminal to any output including circuit common chassis ground or any other guard terminal Doing so will damage the SMU NOTE Low Noise Coaxial Cable For the extended measurement paths over the connector plate use low noise coaxial cable Agilent part number 8121 1191 This cable can maximize the guard effects and minimize the impression of the external noise Figure 3 12 shows the cutting example...

Page 108: ...To cancel the effects of cable resistance connect the Sense line and Force line as close as possible to the DUT terminal To prevent oscillations do not use cables longer than 1 5 m Use low noise coaxial cable Agilent part number 8121 1191 The following figure is for the connection using Kelvin triaxial cable For the connection using triaxial cable connect the cable to the Force terminal only In th...

Page 109: ...U is used for the measurements the Kelvin paths will work as same as Table 3 8 When a four terminal pair 4TP instrument is used the sense lines can be ignored And a Kelvin path is used for the high signal and the other one is used for the low signal For the accurate impedance measurements a wire must be connected between the ASU 1 CMU Return and the ASU 2 CMU Return If the 4TP instrument is not us...

Page 110: ...Kelvin paths force lines will work as same as Table 3 8 Then the sense line is not extended to the DUT When a four terminal pair 4TP instrument is used the sense lines can be ignored And a force line is used for the high signal and the other one is used for the low signal For the accurate impedance measurements a wire must be connected between the ASU 1 CMU Return and the ASU 2 CMU Return If the 4...

Page 111: ... is used for the measurements the Kelvin paths will work as same as Table 3 8 When the MFCMU is used the sense lines can be ignored And a Kelvin path is used for the CMU high and the other one is used for the CMU low For the accurate impedance measurements wires must be connected to the GSWU from the CMH guard and the CML guard as near as possible to the DUT WR 87 RU 87 KLJK WHUPLQDO XDUG 6HQVH RP...

Page 112: ...Kelvin paths force lines will work as same as Table 3 8 Then the sense line is not extended to the DUT When the MFCMU is used the sense lines can be ignored And a force line is used for the CMU high signal and the other one is used for the CMU low signal For the accurate impedance measurements wires must be connected to the GSWU from the CMH guard and the CML guard as near as possible to the DUT W...

Page 113: ...nection between the MFCMU and the connectors you mount It is ok to leave open the ground wire extended from the CMU cable Figure 3 17 MFCMU Output Connection The Hcur Hpot Lcur Lpot lines should be connected to the DUT as shown above Use a 50 coaxial cable Agilent part number 8120 0367 for the Hcur Hpot Lcur Lpot lines connection Use a wire for the guard connection FXU XDUG SRW SRW XDUG FXU QVXODW...

Page 114: ...tion has the following descriptions Using Test Fixture Using Connector Plate NOTE Kelvin connection and non Kelvin connection To make the Kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the DUT device under test minimizes the measurement error caused by the residual resistance of the connection cables The Kelvin connection is ef...

Page 115: ...p Agilent B1500A output To connect between the socket module and the test fixture you can use test leads that have the following terminals Miniature banana to miniature banana Miniature banana to pin plug Miniature banana to miniature clip WARNING Make sure that the lid is closed properly before starting measurement Do not perform the measurement when a test lead is protruding from the test fixtur...

Page 116: ...ection to eliminate the residual resistance effects of test leads and contacts For example you can use the following connections as Kelvin connections on the test fixture Examples Kelvin Connection To cancel the effects of the residual resistance test leads must be connected as close as possible to the DUT 608 9 0D 6HQVH RUFH XDUG XDUG 6HQVH RUFH XDUG XDUG 6HQVH RUFH XDUG XDUG 6HOHFWHG DWH 6RXUFH ...

Page 117: ...inal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle Example The following example connection can be used to reduce the leakage current Extend the outer conductor as close as possible to the probing needle This also reduces the...

Page 118: ...important when you measure low current The following figure shows the theory of guarding The buffer amplifier 1 keeps the potential of the guard conductor at the same potential as the force conductor so current does not flow between the force and guard conductors Therefore the current measured by SMU is same as current at measurement point because no current is leaked XIIHU XDUG RUFH 87 ...

Page 119: ...nnect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle 3 Repeat 1 and 2 for the sense terminal of connector plate 4 Contact the probing needles from force and sense terminals as close as...

Page 120: ...impedance of the voltmeter is very high so the voltage drop of resistances rS1 and rS2 can be ignored The Kelvin connection is effective even when forcing voltage The voltage drop due to the residual resistance of the force line wiring is fed back to the voltage source via a comparator in the sense line The input impedance of comparator is high and current flow into the sense line is very low So o...

Page 121: ...compensate the data measured in the environments described in Required Conditions on page 3 48 This section explains how to perform compensation Required Conditions To Create Compensation Data File NOTE Corrected data by the function is not guaranteed But typical data supplemental data is as follows Capacitance measurement accuracy typical 1 0 5 pF This typical data is for the following measuremen...

Page 122: ...pters 2 ea Agilent part number 1250 2405 for each are required to connect between the Hc and Hp terminals and between the Lc and Lp terminals Connect the Hc Hp cable and the Lc Lp cable as follows It is ok to leave open the ground wire extended from the CMU cable Hc Hp Input 13 B2200A B2201A or AUX INPUT CV1 E5250A Lc Lp Input 14 B2200A B2201A or AUX INPUT CV2 E5250A Switching matrix output termin...

Page 123: ...r obtaining the compensation coefficients and creating the compensation data file see To Create Compensation Data File on page 3 50 Figure 3 18 Extension Cables and Compensation Coefficients Agilent N1300A BNC T adapters Agilent B2200A with B2210A or Agilent B2201A with B2211A or Agilent E5250A with E5252A Agilent B1500A MFCMU B2210A outputs or B2211A outputs or E5252A outputs Perform open calibra...

Page 124: ...ed The lines C2H to C3L should be modified for each measurement environment See Table 3 9 Do not modify the other lines NOTE EasyEXPERT provides the template of the compensation data file for the B2200A B2201A See Table 3 11 Select and use the template suitable for your measurement environment Compensation data file for B2210A Cable connection 3m triax cable MB Mother Board MH Matrix Path High ML ...

Page 125: ...00E 9 80 00E 12 User Triax Cbl H m DATA06 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl L m DATA07 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl H m DATA08 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl L m DATA09 0 00E 3 0 00E 9 1 20E 12 Stray Capacitance END of Data Compensation coefficients Modifications of data file C2H DATA05 C2L DATA06 For the connector plate change the R L C values in the lines...

Page 126: ...e created at step 1 Change the R L C values of the C2H DATA05 C2L DATA06 C3H DATA07 and C3L DATA08 lines to the values recorded at step 2 Do not change any other lines 4 Save the file as your compensation data file e g C temp my_env_1 txt To perform the capacitance compensation enter the file name of the compensation data file to the User Compensation Data File field of the Extended Configuration ...

Page 127: ...le corresponding to C3L DATA08 to the MFCMU Then measure and record the R L and C values 6 If you use the connector plate perform the following procedure a Connect the path cable corresponding to C2H DATA05 to the MFCMU Then measure and record the R L and C values b Connect the path cable corresponding to C2L DATA06 to the MFCMU Then measure and record the R L and C values Table 3 10 R L C Measure...

Page 128: ... 3m data 16494C 002 path b2210a pcif kelvin 4m data 16494C 005 path b2210a cable triax 1_5m data 16494A 001 16495F G C2H C2L C3H and C3L path b2210a cable triax 3m data 16494A 002 path b2210a cable triax 4m data 16494A 005 path b2210a cable kelvin 1_5m data 16494B 001 path b2210a cable kelvin 3m data 16494B 002 path b2210a cable kelvin 4m data 16494C 005 path b2211a pcif triax 3m data B2211A 16494...

Page 129: ...ration or diagnostics Self test Self calibration Diagnostics If problems arise contact Agilent Technologies For details see Agilent EasyEXPERT User s Guide NOTE Interlock Open Close test and High Voltage LED test Interlock function limits the SMU maximum output voltage to 42 V when the measurement terminal is touchable For safety this function must be checked before using the B1500A after power on...

Page 130: ...U for installing WGFMU For returning ASU or RSU do not forget to notify the combination of the unit connection cable and module channel WARNING To prevent electrical shock turn off Agilent B1500A and remove the power cable before removing the connection cables NOTE About B1500A which supports SPGU and WGFMU SPGU and WGFMU are supported by the B1500A serial numbered JP40Nxxxxx and later The other B...

Page 131: ...e HPSMUs must be installed in the slots from the slot number 1 Then the same type of modules must be installed in the contiguous slots For example if the module configuration is two HPSMU two MPSMU and one CMU the B1500A will be shipped with the HPSMUs of the slots 1 to 4 the MPSMUs of the slots 5 to 6 the CMU of the slot 7 and the blank panels of the slots 8 to 10 Table 3 12 Module Installation R...

Page 132: ...3 58 Agilent B1500A User s Guide Edition 10 Installation About Plug in Modules ...

Page 133: ...4 Specifications ...

Page 134: ... modules are shipped from the factory they meet the specifications The supplemental information and typical entries in the following specifications are not warranted but provide useful information about the functions and performance of the instrument This chapter contains the following sections Hardware Specification Conditions Mainframe MPSMU HRSMU ASU HPSMU SMU Common Specifications SMU Suppleme...

Page 135: ...temperature change less than 1 C after self calibration execution not applicable for MFCMU and WGFMU 5 Measurement made within one hour after self calibration execution not applicable for MFCMU and WGFMU 6 Calibration period 1 year 7 SMU integration time setting 1 PLC 1 nA to 1 A range voltage range 20 PLC 100 pA range 50 PLC 1 pA to 10 pA range Averaging of high speed ADC 128 samples per 1 PLC 8 ...

Page 136: ... ASU is connected with the B1517A High Resolution SMU HRSMU 100 V to 100 V 100 mA to 100 mA 0 5 V 0 1 fA B1520A MFCMU 1 1 kHz to 5 MHz 0 035 fFrms b b Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency 1 MHz signal level 250 mVac and measurement time 1 PLC The dis play resolution is 0 000001 fF at 1 fF order by 6 d...

Page 137: ...er of modules Rating for each module type Rating for each module type HPSMU 14 MPSMU 2 HRSMU 2 MFCMU 7 HV SPGU 12 WGFMU 10 Maximum voltage between common and ground 42 V Ground unit GNDU The GNDU is furnished standard with the mainframe Output voltage 0 V 100 V Maximum sink current 4 2 A Output terminal connection Triaxial connector Kelvin remote sensing Load capacitance 1 F supplemental informati...

Page 138: ...solution is limited by fundamental noise limits Minimum displayed resolution is 1 aA at 1 pA range by 6 digits Measurements made in the lower ranges can be greatly impacted by vibrations and shocks These specifications assume an environment free of these factors Power consumption Voltage source mode Current source mode Voltage range V Power consumptiona W a Ic is the current compliance setting 0 5...

Page 139: ... offset in A Vo is the output voltage in V Measurement accuracy A A a Maximum voltage 1 pAb b Available when Agilent E5288A Atto Sense and Switch Unit ASU is used 1 fA 0 1 fA 0 9 15E 15 0 9 12E 15 100 V 10 pAc c Available for HRSMU 5 fA 0 4 fAb 1 fA 0 46 3E 14 Vo E 17 0 46 15E 15 Vo 1E 17 100 V 100 pAc 5 fA 0 5 fAb 2 fA 0 3 1E 13 Vo E 16 0 3 3E 14 Vo 1E 16 100 V 1 nA 50 fA 10 fA 0 1 3E 13 Vo 1E 15...

Page 140: ...l offset in A Vo is the output voltage in V Measurement accuracy A A a Maximum voltage 1 pAb b Available when Agilent E5288A Atto Sense and Switch Unit ASU is used 1 fA 0 1 fA 0 9 15E 15 1 8 12E 15 100 V 10 pAc c Available for HRSMU 5 fA 1 fA 0 46 3E 14 Vo E 17 0 5 15E 15 Vo 1E 17 100 V 100 pAc 5 fA 5 fA 0 3 1E 13 Vo E 16 0 5 4E 14 Vo 1E 16 100 V 1 nA 50 fA 50 fA 0 1 3E 13 Vo 1E 15 0 25 3E 13 Vo 1...

Page 141: ...input to Force output Band width at 3 dB AUX port 30 MHz supplemental information NOTE Connect ASU to dedicated HRSMU The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly NOTE Connection path control Disable source output of the SMU and other instrument connected...

Page 142: ...high resolution ADC and Table 4 8 for high speed ADC Specified measurement resolution is limited by fundamental noise limits Power consumption Voltage source mode Current source mode Voltage range V Power consumptiona W a Ic is the current compliance setting 2 Ic 20 20 Ic 20 40 Ic 40 100 Ic 100 200 Ic 200 Voltage compliancea V a Vc is the voltage compliance setting Power consumptionb W b Io is the...

Page 143: ... measured value fixed offset in A proportional offset in A Vo is the output voltage in V Measurement accuracy A A a Maximum voltage 1 nA 50 fA 10 fA 0 1 3E 13 Vo 1E 15 0 1 3E 13 Vo 1E 15 200 V 10 nA 500 fA 10 fA 0 1 3E 12 Vo 1E 14 0 1 25E 13 Vo 1E 14 200 V 100 nA 5 pA 100 fA 0 05 3E 11 Vo E 13 0 05 25E 12 Vo 1E 13 200 V 1 A 50 pA 1 pA 0 05 3E 10 Vo E 12 0 05 1E 10 Vo 1E 12 200 V 10 A 500 pA 10 pA ...

Page 144: ...ured value fixed offset in A proportional offset in A Vo is the output voltage in V Measurement accuracy A A a Maximum voltage 1 nA 50 fA 50 fA 0 1 3E 13 Vo 1E 15 0 25 3E 13 Vo 1E 15 200 V 10 nA 500 fA 500 fA 0 1 3E 12 Vo 1E 14 0 25 2E 12 Vo 1E 14 200 V 100 nA 5 pA 5 pA 0 05 3E 11 Vo E 13 0 1 2E 11 Vo 1E 13 200 V 1 A 50 pA 50 pA 0 05 3E 10 Vo E 12 0 1 2E 10 Vo 1E 12 200 V 10 A 500 pA 500 pA 0 05 3...

Page 145: ... Voltage compliance 0 V to 100 V MPSMU HRSMU 0 V to 200 V HPSMU Current compliance 10 fA to 100 mA HRSMU with ASU 100 fA to 100 mA HRSMU 1 pA to 100 mA MPSMU 1 pA to 1 A HPSMU Compliance accuracy Same as the current or voltage set accuracy Pulsed measurement Width 500 s to 2 s Period 5 ms to 5 s Period Width 2 ms when Width 100 ms Period Width 10 ms when Width 100 ms Resolution 100 s Pulse setting...

Page 146: ... field noise strengths greater than 3Vrms in the frequency range of 150 kHz to 80 MHz The extent of this effect depends upon how the instrument is positioned and shielded SMU Supplemental Information Maximum allowable cable resistance Kelvin connection Sense 10 Force 10 100 mA 1 5 100 mA Voltage source output resistance Force line Non Kelvin connection 0 2 HPSMU 0 3 MPSMU HRSMU Voltage measurement...

Page 147: ...oot filter ON typical Voltage source 0 03 of V range Current source 1 of I range Range switching transient noise filter ON Voltage ranging 250 mV Current ranging 70 mV Slew rate 0 2 V s maximum Voltage range resolution and accuracy high speed ADC See Table 4 9 Current range resolution and accuracy high speed ADC See Table 4 10 Specified measurement resolution is limited by fundamental noise limits...

Page 148: ...mV 0 035 40 20 V 1 mV 0 01 4 Range Measurement resolution Measurement accuracy A A a a of reading fixed offset in A proportional offset in A Vo is the output voltage in V Range Measurement resolution Measurement accuracy A A a 1 pA b b Available when Agilent E5288A Atto Sense and Switch Unit ASU is used 0 1 fA 1 8 12E 15 10 A 500 pA 0 04 2E 9 Vo 1E 11 10 pA c c 10 pA and 100 pA ranges are availabl...

Page 149: ... 1 5 m or 3 m automatic identification of accessories Test signal Frequency Range 1 kHz to 5 MHz Resolution 1 mHz minimum Accuracy 0 008 Output signal level Range 10 mVrms to 250 mVrms Resolution 1 mVrms Accuracy 10 0 1 mVrms at the measurement port of the MFCMU 15 0 1 mVrms at the measurement port of the MFCMU cable 1 5 m or 3 0 m Output impedance 50 typical Signal level monitor Range 10 mVrms to...

Page 150: ...nitor Range 0 to 25 V Accuracy open load 0 2 of reading 10 mV at the measurement port of the MFCMU or the MFCMU cable 1 5 m or 3 0 m Sweep characteristics Available sweep parameters DC bias voltage oscillator level frequency Sweep type linear log Sweep mode single double Sweep direction up down Number of measurement points maximum 1001 Impedance range Maximum DC bias current A 50 10 10 3 100 10 10...

Page 151: ...2 at Dx 0 1 D accuracy E 100 at Dx 0 1 E 1 Dx 100 at Dx 0 1 G accuracy E Dx at Dx 0 1 E 1 Dx2 1 2 Dx at Dx 0 1 where Zx Impedance measurement value Dx Measurement value of D E EP ZS Zx YO Zx 100 EP EPL EPOSC EP YO YOL YOSC YO S ZS ZSL ZOSC ZS For the parameter value see Table 4 11 to Table 4 13 Calculation example of the measurement accuracy is also shown in Table 4 14 Specification conditions Tem...

Page 152: ... YOSC YO EP ZS Vosc is oscillator level in mV Oscillator level Vosc mV EPOSC ZOSC m 125 Vosc 250 0 03 250 Vosc 1 5 250 Vosc 1 64 Vosc 125 0 03 125 Vosc 1 5 125 Vosc 1 32 Vosc 64 0 03 64 Vosc 1 5 64 Vosc 1 Vosc 32 0 03 32 Vosc 1 5 64 Vosc 1 Cable length EPL YOL nS ZSL m 1 5 m 0 02 3 f 100 750 f 100 5 0 3 m 0 02 5 f 100 1500 f 100 5 0 Frequency f Hz YOSC nS YO nS EP ZS m 1k f 200k 1 125 Vosc 0 5 1 5...

Page 153: ... of MFCMU Measured Conductance G Accuracy a 5 MHz 1 pF 0 61 3 S 192 nS 10 pF 0 32 31 S 990 nS 100 pF 0 29 314 S 9 S 1 nF 0 32 3 mS 99 S 1 MHz 1 pF 0 26 628 nS 16 nS 10 pF 0 11 6 S 71 nS 100 pF 0 10 63 S 624 nS 1 nF 0 10 628 S 7 S 100 kHz 10 pF 0 18 628 nS 11 nS 100 pF 0 11 6 S 66 nS 1 nF 0 10 63 S 619 nS 10 nF 0 10 628 S 7 S 10 kHz 100 pF 0 18 628 nS 11 nS 1 nF 0 11 6 S 66 nS 10 nF 0 10 63 S 619 n...

Page 154: ... detect feature automatically compensates for the cable length going to the SCUU The GSWU contains a relay that automatically opens for IV measurements and closes for CV measurements forming a guard return path to improve CV measurement accuracy Supported SMU MPSMU and HRSMU SCUU Inputs Triaxial port Force1 Sense1 Force2 and Sense2 BNC port for MFCMU Control port for MFCMU Outputs Triaxial port Fo...

Page 155: ...ad 2 direct docking 7 indirect docking Signal output level additional errors SMU bias open load 5 direct docking 10 kHz 10 indirect docking 10 kHz Output impedance 50 typical Signal level monitor additional errors open load 2 CMU bias direct docking 5 SMU bias direct docking 7 CMU bias indirect docking 10 SMU bias indirect docking DC bias function DC voltage bias CMU bias Range 0 to 25 V Resolutio...

Page 156: ...s given by adding the following additional error Ee to the MFCMU measurement error Ee A Zs Zx Yo Zx 100 Zx Impedance measurement value A 0 05 direct docking or 0 1 indirect docking Zs 500 1 f m f frequency in MHz Yo 1 f 10 nS direct docking 2 for indirect docking When the measurement terminals are extended by using the measurement cable the measurement accuracy is applied to the data measured afte...

Page 157: ...e period 30 ns to 10 s Delay range 0 s to 9 99 s Delay resolution minimum 2 5 ns Output count 1 to 1 000 000 Voltage monitor minimum sampling period 5 s Trigger output Level TTL Timing Synchronized with pulse period Trigger width Pulse period 1 2 pulse period 10 s maximum 5 s pulse period 10 s Pulse range and pulse parameter See Table 4 15 Pulse DC output voltage and accuracy See Table 4 16 Figure...

Page 158: ...s to period 10 ns Resolution 2 5 ns Tr and Tf 8 s 10 ns Tr or Tf 8 s Minimum 50 ns 25 ns typical at Vamp 10 V Accuracy 3 2 ns Transition time leading time Tr and trailing time Tf c c The time from 10 to 90 of Vamp which is the amplitude of output pulse Programmable range 8 ns to 400 ms see below for the minimum transition time Resolution 2 ns Tr and Tf 8 s 8 ns Tr or Tf 8 s Minimum typical 15 ns V...

Page 159: ...Condition Output voltage Vout 20 V to 20 V 50 load 40 V to 40 V open load Accuracy a a At 1 s after completing transition 0 5 50 mV open load Amplitude resolution 0 2 mV 10 V range 50 load 0 8 mV 40 V range 0 4 mV 10 V range open load 1 6 mV 40 V range Output connectors SMA Source impedance 50 b b Typical 1 Short circuit current 800 mA peak 400 mA average c c Specification condition N 0 2 Itotal 3...

Page 160: ...ement accuracy open load 0 1 of reading 25 mV Measurement resolution 50 V Note Specified at 1 PLC 20 ms 5 s sample 5 s interval 2000 samples Voltage compensation The HV SPGU can measure the impedance of DUT and adjust the output voltage according to the DUT impedance Figure 4 2 ALWG setup table and pattern example Figure 4 3 ALWG complex waveform example Point Time Voltage 1 0 0 0 V 2 50 ns 0 0 V ...

Page 161: ... additional 2 channels CH 3 and CH 4 by adding another selector selector expander Voltage and current range Selector Adapter Agilent 16445A selector adapter is required to control and to supply DC power to the selector Power requirement 100 to 240 V 50 60 Hz Maximum volt amps VA 20 VA Input Output Channel 1 CH 1 2 SMU and PGU a a PGU channels 1 and 3 have a built in series semiconductor relay 1 Ch...

Page 162: ...G pulse generator DC and SMU pass through Measurement functions See Table 4 17 Voltage force accuracy resolution and timing See Table 4 18 Voltage measurement accuracy resolution and noise See Table 4 19 Current measurement accuracy and resolution See Table 4 20 RF electromagnetic field and WGFMU measurement accuracy The voltage and current measurement accuracy and the timing accuracy between modu...

Page 163: ...nel ALWG function See Table 4 21 Trigger output Level TTL Trigger width 10 ns Generated synchronously with ALWG waveform Software Instrument library for WGFMU control supported operating systems Microsoft Windows XP Professional SP2 and Vista Business SP1 NBTI and general purpose EasyEXPERT Application Tests Sample programs NBTI and general purpose measurement using WGFMU and RTS data analysis WGF...

Page 164: ...initial value 0 V Applicable condition Rise time 10 ns Minimum pulse width See Table 4 24 This is the time until the pulse peak output value 0 to 5 V settles within 0 3 of the setup value after the output voltage is changed from the initial value 0 V Applicable condition Rise time is set to the minimum rise fall time shown in Table 4 22 Table 4 17 Measurement functions voltage forcing voltage meas...

Page 165: ...e result of calibration 96 V 3 V to 3 V 160 V all ranges except for 3 V to 3 V Overshoot undershoot 5 20 mV c c PG mode 50 load Trise and Tfall 16 ns with the 1 5 m cable 32 ns with 3 m cable or 56 ns with 5 m cable Noise Maximum 0 1 mVrms d d Theoretical value for the observed time 100 ns to 1 ms supplemental information Rise time Trise 10 to 90 Fall time Tfall 90 to 10 Accuracy 5 to 5 10 ns of s...

Page 166: ...1 5 mVrms as supplemen tal information Maximum 4 mVrms 5 V to 5 V range Accuracy 0 1 of reading 0 2 of range a a Independent of the range or the mode DC constant voltage output Appli cable condition 10 000 averaging samples for 10 A range and above 100 000 averaging samples for the 1 A range Resolution b b Display resolution Can vary at most 5 based on the result of calibration 0 014 of range Nois...

Page 167: ...0 ns 250 ns 250 ns 100 A 600 ns 600 ns 1 5 s 10 A 2 s 4 5 s 7 s 1 A 6 s 35 s 75 s 25 pF open Mode Current measurement range Settling time Load conditions Voltage measurement Current measurement PG mode NA 150 ns NA 25 pF open Fast IV mode 10 mA 150 ns 100 ns 25 pF 1 k 1 mA 150 ns 250 ns 25 pF 10 k 100 A 400 ns 1 s 25 pF 100 k 10 A 1 2 s 10 s 25 pF 1 M 1 A 6 s 80 s 25 pF 10 M Mode Current measureme...

Page 168: ...eat append Quick test execution Direct control GPIB FLEX Save recall measurement data and settings Test result data management Import export device definition measurement settings my favorite setup measurement data and application library Graph plot display analysis printing Switching matrix control Workspace management Self test self calibration diagnostics Application library Sample application ...

Page 169: ...can be set to VAR1 primary sweep VAR2 secondary sweep VAR1 synchronous sweep or CONST constant voltage current source VAR1 Primary sweep controls the staircase DC or pulsed voltage or current sweep Maximum number of VAR1 steps N1 1001 VAR2 Subordinate linear staircase or linear pulsed sweep After primary sweep is completed the VAR2 unit output value is changed Maximum number of VAR2 steps N2 1001 ...

Page 170: ...ltage or current A second channel can be programmed to output a staircase sweep voltage or current synchronized with the pulsed sweep output Staircase sweep with pulsed bias measurement mode Forces swept voltage or current and measures DC voltage or current A second channel can be programmed to output a pulsed bias voltage or current A third channel can be synchronized with the primary sweep chann...

Page 171: ...lution 100 s Other measurement characteristics Measurement control Single repeat append and stop SMU setting capabilities Limited auto ranging voltage current compliance power compliance automatic sweep abort functions self test and self calibration Arithmetic and analysis functions User functions Up to 20 user defined functions can be defined using arithmetic expressions Measured data and pre def...

Page 172: ...n max interpolation direct marker and marker skip Cursor Direct cursor Line Two lines normal mode grad mode tangent mode and regression mode Auto analysis function On a graphics plot the markers and lines can be automatically located using the auto analysis setup Parameters can be automatically determined using automatic analysis user function and read out functions Data variable display Up to 20 ...

Page 173: ...gif png emf Output Display mode X Y graph list and parameter X Y graph display X axis and up to eight Y axis Linear and log scale Real time graph plotting List display Measurement data and calculated user function data are listed in conjunction with VAR1 step number or time domain sampling step number Up to 20 data sets can be displayed Other functions Import export files File type Agilent EasyEXP...

Page 174: ...80A 81110A 3458A External instruments supported by EasyEXPERT Plus edition All external instruments supported by EasyEXPERT Standard edition Also supported by switching matrix GUI E5250A E5252A cards Furnished Software Prober control execution files 1 Desktop EasyEXPERT software with license to use for Standard edition 1 4155 56 setup file converter tool 1 VXIplug play driver 2 1 Operating system ...

Page 175: ...orm tasks such as analyzing data and creating new application tests This frees up your existing analyzer from being needed for development work and enables you to use it for its primary purpose making measurements GUI based classic test mode Desktop EasyEXPERT offers a classic test mode that maintains the look feel and terminology of the 4155 4156 user interface In addition it improves the 4155 41...

Page 176: ...k Microsoft Windows XP Professional SP2 or later Microsoft Windows Vista Business SP1 or later Language of OS English US English US Processor Intel Celeron 2 GHz Vista certified PC with 1 GB memory Memory 512 Megabytes DDR266 Display XGA 1024 768 SXGA 1280 1024 recommended HDD 1 GB free space on the C drive 10 GB 30 GB recommended free space on a drive for test setup result data storage LAN interf...

Page 177: ...sktop EasyEXPERT Standard edition Also supported by switching matrix GUI E5250A E5252A cards Supported 4155 4156 functionality Desktop EasyEXPERT Standard edition I V Sweep B2200A B2201A switching matrix GUI control Desktop EasyEXPERT Plus edition The following functions are additionally supported I V t Sampling except thinned out mode VSVMU except differential voltage measurement using VMU PGU 41...

Page 178: ...61326 1 AS NZS CISPR 11 Safety CSA C22 2 No 1010 1 1992 IEC61010 1 EN61010 1 UL Std No 61010B 1 Certification CE CSA c us C Tick Dimensions B1500A 420 mm W 330 mm H 575 mm D N1301A 100 SCUU 148 mm W 75 mm H 70 mm D N1301A 200 GSWU 33 2 mm W 41 5 mm H 32 8 mm D E5288A ASU 132 mm W 88 5 mm H 50 mm D B1531A RSU 45 2 mm W 70 mm H 82 mm D 16440A Selector 250 mm W 50 mm H 275 mm D 16445A Selector adapte...

Page 179: ...5 Accessories and Options ...

Page 180: ... Kelvin adapter must be directly connected to the B1500A GNDU connector for taking out the GNDU Force and Sense to the indi vidual connectors Then the GNDU cable must be used for extending the GNDU Force And the triaxial cable must be used for the Sense 1 Triaxial cablea 1 5 m or 3 0 m 1 Power cable 1 Desktop EasyEXPERT CD 1 License to use for Desktop EasyEXPERT Standard edition 1 Software CD incl...

Page 181: ...n package adds one HPSMU and two triaxial cables B1500A A11 MPSMU add on package adds one MPSMU and two triaxial cables B1500A A17 HRSMU add on package adds one HRSMU and two triaxial cables B1500A A20 Capacitance measurement add on package adds the MFCMU and one CMU cable B1500A A25 HVSPGU add on package adds one HVSPGU and two SPGU cables B1500A A28 ASU add on package adds one ASU one D sub cabl...

Page 182: ...6440A SMU PGU pulse generator selector 1 16445A selector adapter for 16440A 1 Control cable 1 5 m between B1500A and 16445A 1 Control cable 40 cm between 16445A and 16440A 1 Triaxial cable 1 5 m between B1500A and 16440A 2 Triaxial cable 1 5 m or 3 0 m 8 Description Quantity Waveform generator fast measurement unit WGFMU 1 Remote sense and switch unit RSU 2 RSU cable 2 4 m between WGFMU and connec...

Page 183: ...etween RSU and RF probe 200 mm 2 Description Quantity 16442B test fixture 1 Accessory case 1 Blank Teflon board for DUT stage 1 28 pin DIP dual in line package socket module 1 Universal socket module 0 075 inch pitch 1 Universal socket module 0 05 inch pitch 1 Connection pin set for universal socket module 10 Connection wire mini banana to pin plug 4 color Connection wire pin plug to pin plug 3 co...

Page 184: ...10 pins 16442B 802 Universal socket module 0 075 inch pitch with 10 pins 16442B 803 Universal socket module 0 05 inch pitch with 10 pins 16442B 810 Extra pin set for universal socket module 10 pins 16442B 811 Extra wire set mini banana to pin plug 6 ea 16442B 812 Extra wire set pin plug to pin plug 6 ea 16442B 813 Extra wire set mini banana to mini clip 6 ea 16442B 814 Extra wire set mini banana t...

Page 185: ... 1 5 m length 16493J 002 3 m length 16493J 003 5 m length 16493K Kelvin triaxial cable B1500 to B1500 16493K 001 1 5 m length 16493K 002 3 m length 16493L GNDU cable 16493L 001 1 5 m length 16493L 002 3 m length 16493L 003 5 m length 16493M Triaxial and D sub cables for ASU 16493M 001 1 5 m length 16493M 002 3 m length 16493N GNDU cable for B2200 Kelvin input 16493N 001 2 m length 16493P SPGU outp...

Page 186: ...or current return path 50 mm 16493R 102 SSMC short open cable for current return path 75 mm 16493R 202 SMA SSMC cable between RSU and DC probe 200 mm 16493R 302 SMA SMA cable between RSU and RF probe 200 mm 16493R 801 WGFMU connector adapter female female 16493R 802 Magnet stand for RSU 16493R 803 Sync terminal connection cable 16494A Triaxial cable 16494A 001 1 5 m length 16494A 002 3 m length 16...

Page 187: ...GNDU 16495J 001 Bulkhead feedthrough connectors female to female 16495J 002 Connectors to contacts for soldering 16495K Connector plate with universal cable holder 16495K 001 Connector plate with rubber holder B1510A High Power Source Monitor Unit module HPSMU B1511A Medium Power Source Monitor Unit module MPSMU B1517A High Resolution Source Monitor Unit module HRSMU B1520A Multi Frequency Capacit...

Page 188: ...E5288A 002 Add triaxial and D sub cables 3 m N1253A Accessories for Digital I O N1253A 100 Digital I O T cable N1253A 200 Digital I O BNC Box N1254A Accessories N1254A 100 GNDU Kelvin Adapter N1254A 108 ASU Magnetic Stand N1300A CMU cable N1300A 001 1 5 m length N1300A 002 3 m length N1301A Accessories for CMU N1301A 100 SMU CMU Unify Unit SCUU N1301A 102 SCUU cable 3 m N1301A 110 SCUU magnetic st...

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