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The 200-mm airlock is not user-serviceable.
In case of a defect contact the Carl Zeiss Microscopy service for assistance.
6.2 Cleaning the airlock
1
If required, use a moistened lint-free cloth to clean the outside of the airlock.
6.3 Lubricating the airlock rod
Possible reason:
•
Airlock rod moves stiffly
Symptom
Possible reason/s
Recommended action/s
Stage
LED is flashing perma-
nently.
Stage is not in transfer position.
Move the specimen stage to the transfer position:
1. Select
Stage/Store-Recall
from the menu.
2. Double-click on
$Exchange
.
Required chamber vacuum can-
not be achieved, although air-
lock door and chamber door are
closed and airlock seems to
work properly.
Gate valve is defective.
Contact the Carl Zeiss Microscopy service.
Parts required
No.
Lint-free cloth
-
Parts required
No.
TEM oil 300
0484-955
A volume of 10 ml is delivered with the airlock.
Lint-free cloth
-