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1. About this manual
This instruction manual is considered to be part of the optional 200-mm airlock.
Read the instructions carefully. Keep the instruction manual nearby the 200-mm airlock and hand
it over to future owners of the instrument.
This instruction manual is designed for users who have been trained by an authorised Carl Zeiss
Microscopy expert to operate the FESEM, the 200-mm airlock is built in.
Operators must not deviate from the instructions provided in this document.
For details on the FESEM refer to the instruction manual of the FESEM.
Safety
instructions
The safety instructions in this manual are classified as follows:
CAUTION
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous situation.
Disregarding this warning MAY result in property damage.
Moreover, you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful
information.