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2.3 Safety devices
In order to prevent any risk of hazard to human health or to property, the FESEM with 200-mm
airlock is equipped with several safety and protective devices.
2.3.1 Interlocks
In addition to the interlock system of the FESEM, a second interlock system is integrated in the
airlock to ensure that the gate valve cannot be moved if either the chamber door or the airlock
door is open.
The gate valve can be operated only
•
when chamber door and airlock door are closed properly,
•
when the airlock rod is retracted and
•
when the specimen stage is in transfer position.
This is to prevent any risk of damaging the airlock rod or the gate valve.
Opening the gate valve is only possible, when the EHT is off and the column chamber valve is
closed.
2.3.2 Error LED
An error LED is included in the control panel on the front of the 200-mm airlock. The light of the
error LED indicates an error state, detected by the airlock interlock system.
