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6. Maintenance and Repair
6.1 Troubleshooting
Symptom
Possible reason/s
Recommended action/s
Airlock rod does not hit the
specimen stage.
Stage position not defined.
Initialise the stage.
Airlock rod does not hit the
specimen stage.
Specimen stage is not in transfer
position.
1. Select
View/SEM Status
from the menu.
2. Ensure
R Limits Enabled =Yes
is shown.
If not, tick the
R Limits Enabled
checkbox under
Tools/GotoPanel/Stage Limits.
Airlock rod moves stiffly.
Airlock rod needs to be lubri-
cated.
Lubricate airlock rod as described in section 6.3
Airlock does not react.
Communication disturbed.
Switch off the FESEM completely.
Switch on again.
Door Open
LED is on.
Chamber door and/or airlock door
is/are open.
Close chamber door and/or airlock door.
No compressed air.
Check the compressed air supply.
Problem in the electrical system.
Contact the Carl Zeiss Microscopy service.
Transfer
LED is flashing per-
manently.
Stage is not in transfer position.
Airlock rod is not mounted or
not retraced.
1. Select
Stage/Store-Recall
from the menu.
2. Double-click on
$Exchange
.
Mount/retract the airlock rod.
Store
LED is flashing perma-
nently.
Vacuum in the airlock is not OK.
Check that chamber door and airlock door are
closed properly.
Switch off the FESEM completely.
If this does not solve the problem, contact the Carl
Zeiss Microscopy service.
Error
LED is on
Airlock electronics has detected
any error state.
Check the air pressure supply of the FESEM.
Switch off the FESEM completely. Switch on
again.
If these actions do not solve the problem, contact
the Carl Zeiss Microscopy service.
