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2. Safety summary
2.1 Intended use
The 200-mm airlock is an accessory option for the following ZEISS FESEM models:
•
ULTRA
plus,
ULTRA 55
•
SUPRA
®
, 40, 55, 55VP
•
MERLIN
®
, MERLIN
®
compact, MERLIN
®
compact VP
•
AURIGA
®
, AURIGA
®
60, AURIGA
®
compact
The 200-mm airlock allows you to quickly transfer the specimen into the specimen chamber with-
out breaking the system vacuum.
The use of the airlock minimises possible contamination of the specimen chamber and reduces
pumping times thus speeding up the specimen exchange procedure.
Using the 200-mm airlock for any other purpose is not allowed and could be hazardous.
2.2 Prevention of accidents and of improper use
CAUTION
Risk of injury or property damage due to improper operation of the option.
Read the user documentation carefully.
Do not operate the option until you have completely read and understood this instruction
manual.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised Carl Zeiss Microscopy service staff only.
