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8
Change to
Vent
mode:
On the control panel, press
Vent
.
Alternatively:
On the
Airlock
, panel click on
Vent
.
The gate valve is closed.
The airlock chamber is ventilated with nitrogen.
9
Click on
Open Column Chamber Valve
.
10 Switch on the EHT.
11 Continue working with the FESEM.
