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3.3 Technical data
•
Gate valve
Separates airlock chamber from the specimen chamber.
Diameter: 50 mm x 213 mm
Driven pneumatically.
If the gate valve is open, the interior of airlock and specimen chamber is illuminated.
•
Airlock rod
Consists of two rods (one rotatable, one stationary), which allows positioning the sample
holder equipped with specimens without visual control.
Airlock rod is removable. Blind plug for sealing the orifice in the airlock door and rack for stor-
age of the airlock rod and/or the blind plug delivered with the airlock.
•
Control
Fully integrated in the SmartSEM
®
software. Alternatively, control via control panel is possi-
ble.
•
Maximum pumping time: 45 seconds
Ventilated with gaseous nitrogen
•
Suitable for all ZEISS standard sample holders except for wafer holders and mask holders.
The 200-mm airlock is labelled with a type plate.
The type plate is located at the bottom of the
airlock.
3.4 Principle of operation
The 200-mm airlock is an evacuatable chamber (
1
)
installed at the specimen chamber (
6
) of the FES-
EM. The gate valve (
4
) separates the airlock from
the specimen chamber, whereas the airlock door (
2
) separates it from the atmosphere.
Environmental requirements
Ambient Temperature
approx. 21°C +/-4°C
Stability
0.5 °C/h
Relative humidity
Less than 65%
Altitude
Maximum 2000 m above sea level.
Pollution degree
2
Electrical supplies
Nominal DC voltage
24V DC
Current consumption
max. 1 A
