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ii
IM 11M13A01-02E
ZA8F
Flow setting unit
(for manual calibration use)
ZR40H
Automatic Calibration unit
-
Auxiliary ejector assembly for
high temperature use
(Part No. E7046EC, E7046EN)
-
Calibration gas unit case
(Part No. E7044KF)
-
Check valve
(Part No. K9292DN, K9292DS)
ZO21S
Standard gas unit
CMPL : Customer Maintenance Parts List
This manual consists of twelve chapters. Please refer to the reference chapters for installation,
operation and maintenance.
Table of Contents
Chapter
Outline
Relates to
Installation Operation Maintenance
1. Overview
Equipment models and system configuration
examples
B
C
B
2. Specifications
Standard specification, model code (or
part number), dimension drawing for each
equipment
A
B
B
3. Installation
Installation method for each equipment
A
C
4. Piping
Examples of piping in two standard system
configurations
A
C
5. Wiring
Wiring procedures such as “Power supply
wiring”, “output signal wiring” or others
A
C
6. Components and
Their Functions
Major parts and function are described in this
manual
C
B
B
7. Startup
Basic procedure to start operation of EXAxt
ZR.
Chapter 7 enables you to operate the
equipment immediately.
A
C
8. Detailed Data Setting Details of key operations and displays
B
C
9. Calibration
Describes the calibration procedure required in
the course of operation.
B
C
10. Other Functions
Other functions described
B
C
11. Inspection and
Maintenance
How to conduct maintenance of EXAxt ZR and
procedures for replacement of deteriorated
parts
B
A
12. Troubleshooting
This chapter describes measures to be taken
when an abnormal condition occurs.
C
A
CMPL (parts list)
User replaceable parts list
C
B
A : Read and completely understand before operating the equipment.
B : Read before operating the equipment, and refer to it whenever necessary.
C : Recommended to read it at least once.
Содержание ZR22S
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