Table of NA Correction Coefficients
IM 735201-01E
App-3
Wavelength: 785 nm, NA = 0.45
Wavelength: 785 nm, NA = 0.5
Wavelength: 785 nm, NA = 0.55
RIM
30%
35%
40%
45%
50%
55%
60%
65%
70%
75%
80%
85%
90%
95%
30%
1.010 1.009 1.008 1.007 1.007 1.006 1.005 1.005 1.004 1.004 1.003 1.003 1.002 1.002
35%
1.011 1.010 1.010 1.009 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.003
40%
1.013 1.012 1.011 1.010 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.004
45%
1.014 1.013 1.012 1.011 1.010 1.010 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.005
50%
1.015 1.014 1.013 1.012 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.006
55%
1.016 1.015 1.014 1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007
60%
1.016 1.015 1.014 1.014 1.013 1.012 1.012 1.011 1.010 1.010 1.009 1.009 1.008 1.008
65%
1.017 1.016 1.015 1.014 1.014 1.013 1.012 1.012 1.011 1.011 1.010 1.010 1.009 1.009
70%
1.018 1.017 1.016 1.015 1.014 1.014 1.013 1.013 1.012 1.011 1.011 1.010 1.010 1.009
75%
1.019 1.018 1.017 1.016 1.015 1.014 1.014 1.013 1.013 1.012 1.012 1.011 1.011 1.010
80%
1.019 1.018 1.017 1.017 1.016 1.015 1.015 1.014 1.013 1.013 1.012 1.012 1.011 1.011
85%
1.020 1.019 1.018 1.017 1.017 1.016 1.015 1.015 1.014 1.013 1.013 1.012 1.012 1.011
90%
1.021 1.020 1.019 1.018 1.017 1.016 1.016 1.015 1.015 1.014 1.013 1.013 1.012 1.012
95%
1.021 1.020 1.019 1.019 1.018 1.017 1.016 1.016 1.015 1.015 1.014 1.014 1.013 1.013
RIM
30%
35%
40%
45%
50%
55%
60%
65%
70%
75%
80%
85%
90%
95%
30%
1.008 1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.003 1.003 1.002 1.002 1.001 1.001
35%
1.009 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.003 1.003 1.002 1.002
40%
1.010 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.003 1.003
45%
1.011 1.010 1.009 1.009 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.005 1.004 1.004
50%
1.012 1.011 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.005
55%
1.012 1.011 1.011 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.007 1.006 1.006 1.005
60%
1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.006 1.006
65%
1.014 1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.007
70%
1.014 1.013 1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.008 1.007
75%
1.015 1.014 1.013 1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.009 1.008 1.008
80%
1.015 1.015 1.014 1.013 1.013 1.012 1.011 1.011 1.010 1.010 1.010 1.009 1.009 1.008
85%
1.016 1.015 1.014 1.014 1.013 1.012 1.012 1.011 1.011 1.010 1.010 1.010 1.009 1.009
90%
1.016 1.016 1.015 1.014 1.014 1.013 1.012 1.012 1.011 1.011 1.011 1.010 1.010 1.009
95%
1.017 1.016 1.015 1.015 1.014 1.013 1.013 1.012 1.012 1.011 1.011 1.011 1.010 1.010
RIM
30%
35%
40%
45%
50%
55%
60%
65%
70%
75%
80%
85%
90%
95%
30%
1.006 1.006 1.005 1.004 1.004 1.004 1.003 1.003 1.002 1.002 1.002 1.001 1.001 1.001
35%
1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.004 1.003 1.003 1.002 1.002 1.002 1.001
40%
1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.004 1.004 1.004 1.003 1.003 1.003 1.002
45%
1.009 1.008 1.007 1.007 1.006 1.006 1.005 1.005 1.005 1.004 1.004 1.004 1.003 1.003
50%
1.009 1.009 1.008 1.007 1.007 1.006 1.006 1.006 1.005 1.005 1.004 1.004 1.004 1.004
55%
1.010 1.009 1.009 1.008 1.007 1.007 1.007 1.006 1.006 1.005 1.005 1.005 1.004 1.004
60%
1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.006 1.005 1.005 1.005
65%
1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.006 1.006 1.006 1.005 1.005
70%
1.011 1.011 1.010 1.010 1.009 1.009 1.008 1.008 1.007 1.007 1.007 1.006 1.006 1.006
75%
1.012 1.011 1.011 1.010 1.009 1.009 1.009 1.008 1.008 1.007 1.007 1.007 1.006 1.006
80%
1.012 1.012 1.011 1.010 1.010 1.009 1.009 1.009 1.008 1.008 1.007 1.007 1.007 1.007
85%
1.013 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.009 1.008 1.008 1.008 1.007 1.007
90%
1.013 1.012 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.009 1.008 1.008 1.008 1.007
95%
1.014 1.013 1.012 1.012 1.011 1.011 1.010 1.010 1.009 1.009 1.009 1.008 1.008 1.008