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DESIGN AND FUNCTION

Series 65

16/129

Edition 2019-05-03

963283EA

3.2.1

Pressure control system overview and function

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.

Example: Downstream control

1 Valve

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Controller and actuator

7 Cable to remote control unit

8 Cable to power supply

9 HV Pump

eff

= Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (mbar ls

-1

)

p Pressure (mbar)

or units used in USA

eff

= 12.7 • Q / p

eff

effective pump speed (ls

-1

)

Q Gas flow (sccm)

p Pressure (mTorr)

V Volume

Seff

Содержание 653 Series

Страница 1: ...250 mm I D 4 10 This manual is valid for the valve ordering number s 653 GH 2 sensor inputs analog outputs 653 AH 2 sensor inputs analog outputs 15V SPS 653 HH 2 sensor inputs analog outputs PFO 653...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...22 4 2 4 Tightening torque 23 4 2 5 Mounting with centering rings 23 4 2 6 Mounting with O ring in grooves 24 4 2 7 Admissible forces 25 4 2 8 Requirements to sensor connection 25 4 3 Electrical conne...

Страница 4: ...97 5 3 Open valve 97 5 4 Position control 97 5 5 Pressure control 97 5 6 Display information 98 5 6 1 Power up 98 5 6 2 Operation 99 5 6 3 Error 99 5 6 4 Safety mode 99 5 7 Operation during power up 1...

Страница 5: ...Series 65 963283EA Edition 2019 05 03 5 129 12 Spare parts 124 12 1 Drawing 124 12 1 1 Valve unit with seals and grease 125 12 1 2 Control and actuating unit 126 12 1 3 Accessories 127 13 Appendix 128...

Страница 6: ...se product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Description CPA Control Performance Ana...

Страница 7: ...VDC 5 1200 mA max connector POWER connector SENSOR Sensor power supply 2 653 G 653 H Input Output 24 VDC resp 15 VDC same as input but 2 0 A max at 15 VDC 1 5 A max at 24 VDC connector POWER connecto...

Страница 8: ...d valve closed adjustable with CPA 4 0 valve opened adjustable with CPA 4 0 connector POWER max 70 V 0 1 A connector POWER Digital inputs 4 voltage control contact control 5 24V 2 10 mA 3 3V 2 mA conn...

Страница 9: ...typ 0 45 s typ 0 9 s typ 0 5 s typ 0 9 s typ 0 5 s typ Opening time throttling only full stroke 0 7 s typ 0 4 s typ 0 8 s typ 0 45 s typ 0 9 s typ 0 5 s typ 0 9 s typ 0 5 s typ Closing time throttlin...

Страница 10: ...ycles open closed open Throttling cycles open max throttle open 200 000 unheated and under clean conditions 1 000 000 unheated and under clean conditions Admissible operating temperature 10 C to 120 C...

Страница 11: ...50 10 65348 Max differential pressure on plate during isolation 1200 mbar in either direction 1200 mbar in either direction 1200 mbar in either direction 1200 mbar in either direction Max differential...

Страница 12: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 13: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Страница 14: ...283EA 3 Design and Function 3 1 Design 1 Plate seal 7 Rotary feed through seals 2 Body seal 8 Pendulum plate 3 Shaft feed through seals 9 Sealing ring 4 Bonnet seal 10 Bonnet 5 Actuator 11 Body 6 Inte...

Страница 15: ...stepper motor An encoder monitors the position This principle ensures fast and accurate process pressure control For opening or control the sealing ring is lifted pneumatically by compressed air afte...

Страница 16: ...nces Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pump Seff...

Страница 17: ...into which gas is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between...

Страница 18: ...sical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it do...

Страница 19: ...not be touched NOTICE Sealing surfaces Sealing surfaces of valve and vacuum system could be damage in case of incorrect handling Only qualified personal are allowed to install the valve into the vacuu...

Страница 20: ...Edition 2019 05 03 963283EA Mount valve to a clean system only 4 2 1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown...

Страница 21: ...19 05 03 21 129 4 2 2 Connection overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power su...

Страница 22: ...ect wiring 8 This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft This port 1 8 ISO NPT could be connected to the vacuum line see Figure...

Страница 23: ...ved surface quality surface treatment and lubrication The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter min 1d and the friction coefficient of...

Страница 24: ...bs ft DN100 4 65340 20 23 35 40 35 40 15 17 26 30 26 30 DN160 6 65344 35 40 35 40 35 40 26 30 26 30 26 30 DN200 8 65346 35 40 35 40 80 90 26 30 26 30 59 67 DN250 10 65348 35 41 65 70 80 90 26 30 48 52...

Страница 25: ...s is min 1 x thread diameter Please contact VAT for more information 4 2 8 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required Sensor res...

Страница 26: ...or power supply Connect all cables exactly as shown in the following descriptions and schematics NOTICE Burned connector pins spark Connector pins or electronic parts could damage if plugged and unpl...

Страница 27: ...ion plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground strap at system...

Страница 28: ...g External 15 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module for sc...

Страница 29: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 24V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with...

Страница 30: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with 4 4...

Страница 31: ...away from noise sources Connect Power supply 24 GND and GND 15V 15V at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connecto...

Страница 32: ...ocate it away from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only scre...

Страница 33: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws...

Страница 34: ...and 2 digital outputs Digital inputs may be operated either by switches or by voltage sources Digital inputs on the POWER and INTERFACE connector have the same priority Active digital inputs have high...

Страница 35: ...INSTALLATION 963283EA Edition 2019 05 03 35 129 4 3 3 2 Power connector Configuration with voltage source for digital inputs Interlock 4 3 3 3 Interface Connector Configuration with switches for digit...

Страница 36: ...INSTALLATION Series 65 36 129 Edition 2019 05 03 963283EA 4 3 3 4 Interface Connector Configuration with voltage source for digital inputs...

Страница 37: ...l command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration Configuration ca...

Страница 38: ...UND Digital common Common for all digital output Connect or terminal of source with common 4 3 3 7 Analogue output Pin Function Signal type Description 22 PRESSURE Analog output This output indicates...

Страница 39: ...e DB 25 connector 4 3 5 Service port connection The service port connector SERVICE USB B allows to connect the valve to a USB A port of a computer This requires a USB A B cable male male The Service p...

Страница 40: ...Interface configuration Refer to chapter RS232 interface configuration for details 5 Sensor configuration Basic configurations of the valve must be adapted according to application needs Refer to chap...

Страница 41: ...rget Position Actual Position The pressure scaler defines the unit range of all pressure values Target Pressure Actual Pressure Overall there are six individual scalers RS232 Position Scaler Pressure...

Страница 42: ...en the valve performs the homing procedure Standard Do homing after restart if valve is not in sealed state Open Command Do homing on an open command Move Command Do homing on any move command At Star...

Страница 43: ...sensor connection to get more information about the pinning Each of the four IO 2 inputs and 2 outputs has following parameters Parameter Description Enable True enables the input or output State Cur...

Страница 44: ...alve has to know what sensors are connected Parameter Description Available Set to True if a sensor is connected Enable Set to True if the sensor signal is used for pressure control Range Data Unit Se...

Страница 45: ...al Pressure In other case the high range sensor is used During position control Soft Switch is used Threshold High SFS low sensor Threshold Low SFS low sensor Defines the crossover area in Crossover M...

Страница 46: ...r 1 Range Scale Linear Sensor 1 Input Source Analog Sensor 2 Available 1 Sensor 2 Enable 1 Sensor 2 Range Data Unit mTorr Sensor 2 Range Upper Limit Data Value 100 0 Sensor 2 Range Lower Limit Data Va...

Страница 47: ...n be read on parameter Sensor x Offset Value SFS Clear the offset values by setting Execute to 2 The result of clearing the zero adjust Sensor x Offset Value SFS 0 0 Sensor 1 Enable Sensor 2 Enable 0...

Страница 48: ...anymore Do not perform Zero Adjust as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result Refer to manual of sensor manufacturer for warm up time 2 In OUTPUT...

Страница 49: ...sor 1 0 means the whole pressure range of the sensors Open Speed Define the speed for opening the valve during the learn procedure 1 0 means full speed Status State of the current learn 0 Not Started...

Страница 50: ...m3 s pWP pressure of working point Pa CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar CWP required conductance of working point...

Страница 51: ...ts But if the result of the pressure control does not meet the expectations the different controller units can be an option for optimization With the four controller units it s possible to use an own...

Страница 52: ...e sensor is phased out while high range sensor is phased in during pressure rise During pressure decrease the high range sensor is phased out while low range sensor is phased in This maintains a funct...

Страница 53: ...control algorithm a special procedure called learn must be executed first see chapter x The valve will observe the behavior of the vacuum system by moving the valve to different positions During the l...

Страница 54: ...problems can be reduced But control response time will be slowed down by this measure Learn Data Selection There are up to 4 different learn data sets available Select which Learn Data set the adaptiv...

Страница 55: ...ize over undershoot of pressure 5 10 15 20 25 0 5 10 15 pressure time New Target Pressure without pressure ramp Actual Pressure Target Pressure Target Pressure Used ramp 5 10 15 20 25 0 5 10 15 pressu...

Страница 56: ...parameter value Ramp Time Ramp Time is a value in the unit seconds After setting a new Target Pressure Target Pressure Used will converge the Target Pressure in the slope defines in parameter Ramp Slo...

Страница 57: ...vailable Tv 500 sec Tv 500 sec Adaptive pressure controller Fixed pressure controller Fixed pressure controller Soft Pump Soft Pump Use the formula below to define the applicable pressure control algo...

Страница 58: ...ance with fixed PI pressure controller Tuning of control pressure performance with Soft pump refer to chapter Tuning of control performance with soft pump pressure controller 4 10 4 1 Tuning of contro...

Страница 59: ...or connection Sensor delay adjustment Sensor delay adjustment effects Stability Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pres...

Страница 60: ...rol a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation In case a long ramp time is requi...

Страница 61: ...ation 4 Repeat from step 2 with slower valve speed until required response is achieved Required information for support Go to Tools Create Diagnostic File in Control Performance Analyzer and save file...

Страница 62: ...tion A PI controller delivers the best results for a certain working point pressure gas flow If there is only one working point this pressure and gas flow has to be used for optimizing P and I gain If...

Страница 63: ...Series 65 INSTALLATION 963283EA Edition 2019 05 03 63 129 Example...

Страница 64: ...n results in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in ju...

Страница 65: ...ated for PI controller mode When switching to pump down control mode the P gain value evaluated for the PI controller has to be send to the valve controller When switching back into PI controller mode...

Страница 66: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Страница 67: ...ols Create Diagnostic File in Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description...

Страница 68: ...ITION CONTROL PRESSURE CONTROL OPEN VALVE or CLOSE VALVE command POSITION CONTROL Set R aaaaaa R Get i 38 i 38aaaaaaaa data length for Set 6 characters for Get 8 characters aaaaaa position SETPOINT va...

Страница 69: ...i 60 i 60aaaaaaaa data length 8 characters aaaaaaaa sensor 1 offset 140000 0140000 1 4V 1 4V This function returns the sensor 1 offset voltage adjusted by ZERO SENSOR 2 OFFSET Get i 61 i 61aaaaaaaa da...

Страница 70: ...nput 9 INTERLOCK CLOSED by digital input C power failure D safety mode E error read ERROR STATUS for details c Power Failure Option 0 disabled 1 enabled d Warning 0 no warnings 1 warnings read WARNING...

Страница 71: ...sure raising 0 Ok 1 pressure not raising during LEARN gasflow missing g Pressure stability 0 OK 1 sensor unstable during LEARN h Reserved do not use This function checks the status of LEARN and indica...

Страница 72: ...eserved do not use This function returns warning information about the valve If a warning is present countermeasure should be taken Use RESET command to delete service request bit Remark Without LEARN...

Страница 73: ...arning present read WARNINGS and ERROR STATUS for details This function returns an assembly consisting of POSITION PRESSURE and main status information for the valve HARDWARE CONFIGURATION Get i 80 i...

Страница 74: ...CCESS MODE Set c 01aa c 01 data length 2 characters aa 00 local operation service port 01 remote operation change to local enabled 02 locked remote operation change to local not possible via service p...

Страница 75: ...failure end position 0 valve will close 1 valve will open 2 valve stay on actual position f Slave offline position 0 valve will close 1 valve will open 2 valve stay on actual position g Synchronizatio...

Страница 76: ...3 for pressure control with low range sensor and read high range sensor from SENSOR 2 READING resp SENSOR 1 READING b 1 ZERO enabled 0 ZERO disabled cdefgh High range Low range sensor full scale ratio...

Страница 77: ...SOR 1 LINEARIZATION Set s 17aaaabbbb s 17 Get i 17 i 17aaaabbbb data length 8 characters a logarithmic resolution millivolt decade 0000 linearizing off 0001 min value 9999 max value default value 0000...

Страница 78: ...omes linear full scale 1000000 Pressure control algorithm adaptive downstream needs a linear sensor signal therefore a logarithmic signal must be linearized Example s 1700000000 Linear sensor Example...

Страница 79: ...000000 e g 0010000 pressure range 0 10 000 This function defines the communication range between the valve and the host computer for POSITION PRESSURE and SENSOR READING Remark In case ZERO has been p...

Страница 80: ...op bits 0 1 1 2 e 0 IC 8 PM V2 f digital input OPEN VALVE 0 not inverted 1 inverted 2 disabled g digital input CLOSE VALVE 0 not inverted 1 inverted 2 disabled h 0 reserved do not change This function...

Страница 81: ...for details This command starts LEARN By OPEN VALVE CLOSE VALVE or POSITION CONTROL commands the routine may be interrupted Remark Without LEARN the PID adaptivecontroller is not able to perform press...

Страница 82: ...rk Refer to Valve speed adjustment for details RESET Set c 82aa c 82 data length 2 characters aa 00 reset service request bit from WARNINGS 01 reset FATAL ERROR restart control unit This function rese...

Страница 83: ...controller bb Parameter number see table below c Parameter value depends on parameter number a floating point type or a integral type value max length 20 characters floating point type format x y or...

Страница 84: ...00 Default is 0 00 s Get i 02A00 i 02A00c RAMP TIME Set s 02A01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 s Get i 02A01 i 02A01c RAMP MODE Set s 02A02c s 02 UINT c 0 or 1 0 constant time 1 const...

Страница 85: ...time slope is SFS 10V in 10 Seconds In the adaptive pressure controller mode the RAMP TIME parameter also can be a value to minimize over undershooting The ramp could be used to harmonize the adaptiv...

Страница 86: ...tant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint valu...

Страница 87: ...Command Request Data Type Values RAMP TIME Pressure setpoint ramp time s Set s 02C01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 Get i 02C01 i 02C01c RAMP MODE Set s 02C02c s 02 UINT c 0 or 1 0 con...

Страница 88: ...Constant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint...

Страница 89: ...sing E 000011 Invalid number of characters between and E 000012 Invalid value E 000023 Value out of range E 000030 Hardware Pressure mode Zero or Learn without Sensor E 000040 Command not applicable f...

Страница 90: ...or full scale communication range set to 100000 Pressure setpoint Xxxxxx setpoint value 0 communication range C R S xxxxxx S no 2nd answer S 000119 119 C R F S setpoint Hold mode Freeze valve position...

Страница 91: ...of sensor 2 zzzzzz X X xxxxxxyyyyyyzzzzzz sensor 1 250mTorr sensor 2 10Torr communication range 100000 pressure 119 0mTorr X 001190001190001190 pressure 1320mTorr X 013200002500013200 ranges xxxxxx 0...

Страница 92: ...offset 13 1000 sensor 1 full scale pressure Read offset of sensor 2 i 07 i 07xxxxxx i 07 00009 offset 9 1000 sensor 2 full scale pressure Position air error p p ____OK p POS ER p AIR ER position o k...

Страница 93: ...t be used alone with integrated controller c Sensor 2 Full Scale Range Torr or mbar 0 0 0 010 1 0 0 020 2 0 0 025 3 0 0 050 4 0 0 100 5 0 0 200 6 0 0 250 7 0 0 500 8 0 1 0 9 0 2 0 A 0 2 5 B 0 5 0 C 0...

Страница 94: ...arger 1000 E 000007 PRESSURE MODE ZERO or LEARN have been selected with no sensor connected display format set for no sensor E 000008 Controller is not in correct mode for the given command e g L XXXX...

Страница 95: ...lete into the system 5 1 Normal operation This valve is designed for downstream pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both cas...

Страница 96: ...and maintenance How to start 1 Connect service cable USB A B cable male male between PC and valve A drive opens 2 Double Click on CPA4 exe to open the Control Performance Analyzer 3 Click Local for L...

Страница 97: ...SETPOINT for details Select or enter position setpoint 1 In OUTPUT Buffer POSITION SETPOINT 2 Select a valid value 3 In OUTPUT Buffer CONTROL MODE SETPOINT 4 Select Position value 2 5 5 Pressure cont...

Страница 98: ...s are illuminated 2st information for about 3s Valve type e g 6 7 0 3st information for about 3s Firmware generation and Firmware Type e g 01 0C 0 1 0 C 4st information for about 3s Firmware version a...

Страница 99: ...escription Digit 1 Digit 2 Digit 3 Digit 4 Error number xyz E x y z alternately if error code exist Error code u v w For Error number code Refer to Trouble shooting for details 5 6 4 Safety mode By me...

Страница 100: ...onductance All other than closed not isolated Valve runs to max throttle position to detect limit stop for homing Display shows configuration of product resp Ho until homing is done and afterwards to...

Страница 101: ...ve and system await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned in chapter Technical data 5 10 Behavior In case of compr...

Страница 102: ...u v w 1 No valve connected Connect valve controller to the valve 2 Non volatile memory failure Replace valve controller 3 Analog digital converter of sensor input failure Replace valve controller 4 I...

Страница 103: ...tion controller failure in master slave communication Contact vat support 4 0 Compressed air error Check compressed air 4 2 Power supply low voltage detected Check if power supply is ok and is able to...

Страница 104: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Страница 105: ...seals gate and body seal of sealing ring 12 month but max 200 000 cycles 6 months but max 200 000 cycles 3 months but max 200 000 cycles actuator shaft seals 1 000 000 cycles 6 months 3 months 1 Thos...

Страница 106: ...equired tool Electrical power and compressed air is required to perform steps 1 to 11 during disassembly respectively 11 to 1 during assembly 1 Set the valve to local mode 2 Activate Maintenance reduc...

Страница 107: ...handle 9 Release MAINTENANCE BUTTON 10 Remove sealing ring 11 To prevent the shaft and retaining pins from moving during work switch the valve to safety mode Refer to Safety mode for details Retaining...

Страница 108: ...g ring 18 Deposit vacuum grease on the bottom side of the body seal according to drawing below Pay attention that the quantity of vacuum grease listed in the table to the right is distributed constant...

Страница 109: ...iption Required tool Electrical power and compressed air is required to perform steps 1 to 11 during disassembly respectively 11 to 1 during assembly 1 Set the valve to local mode 2 Activate Maintenan...

Страница 110: ...hand unlock the sealing ring by pressing the handle 9 Release MAINTENANCE BUTTON 10 Remove sealing ring 11 To prevent the shaft and retaining pins from moving during work switch the valve to safety m...

Страница 111: ...t 24VDC power Wait for 60s then disconnect cables and compressed air from valve actuator 16 Unfasten all 2 controller screws and lift controller carefully from actuator Allen Wrench 4 mm 17 Unfasten a...

Страница 112: ...seals if necessary Lubricate each o ring with 0 05 ml vacuum grease 23 Install o rings 24 Deposit 0 1 ml vacuum grease on each o ring Pay attention that grease is distributed constantly over the whol...

Страница 113: ...in reverse order as they had been disassembled steps 11 to 2 open end wrench 13mm 32 Clean the valve sealing surface Lint and dust free towel a little soaked with isopropyl alcohol 33 Clean the valve...

Страница 114: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Страница 115: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Страница 116: ...on control and actuating unit with panel removed All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above Do not t...

Страница 117: ...crews and lift controller carefully from actuator Allen Wrench 4 mm 3 Place Option board from behind in the controller 4 Tighten option board with the 2 screws with 1 1Nm 5 Pozidriv screw driver size...

Страница 118: ...pairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service ce...

Страница 119: ...work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Va...

Страница 120: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Страница 121: ...ing products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vat...

Страница 122: ...EA 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclai...

Страница 123: ...AL 963283EA Edition 2019 05 03 123 129 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out th...

Страница 124: ...spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff The following table s contain spar...

Страница 125: ...cs required per valve 927458 5 Sealing ring shaft seals Viton N 5111 112 12 pcs required per valve N 5111 112 12 pcs required per valve N 5111 112 16 pcs required per valve N 5111 112 16 pcs required...

Страница 126: ...tuator option All Item refer to chapter Drawing 12 1 2 Control and actuating unit Description Part number Control and actuating unit Too many to list Please contact VAT Option board with SPS module 15...

Страница 127: ...with D Sub9 connector 735567 D Sub15 to D Sub9 Service cable PC to valve Service connector 809474 USB A B male male 12 1 3 1 Centering ring with Viton o ring Description Valve size Product ordering nu...

Страница 128: ...APPENDIX Series 65 128 129 Edition 2019 05 03 963283EA 13 Appendix No information entered on time...

Страница 129: ...Series 65 963283EA Edition 2019 05 03 129 129 This page left blank intentionally...

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