Ulvac UTM2300 Series, Инструкция по эксплуатации

Страница: 32 / 102

SECTION 4 SPECIFICATIONS
18
4
4.1
Standard Specifications for Pump Unit
Turbo molecular pump model
UTM2300A-MI-AVWX
UTM2300A-MI-AFWX
(Note 1)
UTM2300A-MI-BVWX
UTM2300A-MI-BFWX
Inlet flange VG250 / ISO250F
Outlet flange KF40
Cooling method Water cooled
Mass 56 kg
Ultimate pressure (after baking)
10
-7
Pa order
Maximum allowable flow rate Refer to Section 4.2
Maximum allowable inlet pressure
(N
2
continuous exhaust)
(Note 2)
4.5 Pa
Maximum allowable outlet pressure
(N
2
continuous exhaust)
(Note 2)
200 Pa
Pumping speed
(Note 4)
N
2
Ar
H
2
2100 L/s
2000 L/s
1200 L/s
Compression ratio
N
2
He
H
2
1×10
8
or more
5×10
3
9×10
2
Rated speed 33700 rpm
Start-up time 9 minutes or less
Mounting position In any desired direction (Note 5)
Vibration level
(by ULVAC's method)
0.01 μm or less (0-peak)
Noise 60 dB(A) or less
R ecommended flow rate of purge gas
(Note 3)
30 mL/min
Recommended pumping speed of
backing pump in case of gas purge
1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication
Contact
REMOTE (D-sub 37 pin female, Screw lock size M2.6)
(cf.Section 6.7 "Remote-control Connector")
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL /
REMOTE / ALARM / WARNING / CONNECTION
Serial
RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6)
(cf.Section 6.8 "Communication Specifications")
Speed variation
Speed is variable between 25 % and 100 % of the rated speed.
(set as 0.1 %)
Alarm history Remembers date, time, and description of last 99 alarm events.