Ulvac UTM2300 Series, Инструкция по эксплуатации

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SECTION 4 SPECIFICATIONS
20
4
(Note 1) Do not use corrosive gasses because there is a possibility that the rotor blade is damaged
by corrosion.
(Note 2) Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable
outlet pressure cannot be satisfied at same time.
(Note 3) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 4) Without a protective net. Pumping speed for N
2
is 2900 L/s with a protective net.
(Note 5) The outlet port of the turbo molecular pump should face horizontally or vertically when
installing the pump horizontally and obliquely. (Refer to Section 5.1.1 "Pump Mounting
Direction" for detail.)
(Note 6) The time can be changed to 2 seconds from 1 second.
(Note 7) Temperature without dew condensation. Refer to Section 5.3 "Preparation for Operation".
Installation conditions
(Refer to UL/EN 61010-1 standard)
Use : Indoor, Altitude max : 2000 m,
Overvoltage category III, Pollution degree 2
IP classification 40
Environmental temperatures
Operation : 10 to 40 degrees C. /
Storage : -25 to 70 degrees C. (No dew condensation)
Relative humidity 40 tso 80 %RH